Nanopore Sensors in Microfluidic Arrays via Controlled Breakdown

Solution Overview

Problem

Conventional methods for fabricating solid-state nanopores in microfluidic channels face challenges such as alignment requirements, integration issues, and handling risks due to the need for direct line-of-sight access with high-energy beams, which limits the yield and durability of nanopore sensors, especially in reduced microfluidic channel dimensions and aqueous environments.

Innovation Solution

The controlled breakdown (CBD) method induces a dielectric breakdown in a thin insulating membrane within microfluidic channels to form nanopores, allowing for in situ fabrication under biological sensing conditions, enabling integration with complex microfluidic architectures and improving device durability and applicability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If high-energy ion or electron beams are used to fabricate nanopores, then nanopores can be formed in ultrathin dielectric membranes, but direct line-of-sight access is required which complicates integration into microfluidic devices

Engineering Contradiction:
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces mechanical beam-based fabrication with an electric field-based controlled breakdown method. High-energy ion or electron beams are substituted with electrical signals applied through microfluidic channels, eliminating the need for line-of-sight access and complex alignment mechanisms while maintaining nanopore fabrication capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary electrical signal transmission mechanism through the microfluidic channel medium. Instead of direct beam access, electric fields are transmitted through the aqueous solution in the microfluidic channels to induce dielectric breakdown and nanopore formation, serving as a mediator between the control system and the membrane

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If strict alignment requirements are imposed during nanopore fabrication, then nanopores can be formed with precise positioning, but the yield of functional devices is reduced

Engineering Contradiction:
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent employs self-alignment mechanisms where the electric field naturally concentrates at the membrane location within the microfluidic channel. The system uses the inherent geometry of the microfluidic channel and membrane interface to automatically position nanopores without requiring external alignment procedures, thereby improving yield while maintaining precision

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent performs preliminary structuring of the microfluidic channel geometry and membrane positioning before nanopore fabrication. The microfluidic channel network is pre-designed to guide electric field lines to specific membrane regions, establishing precise nanopore locations through the preliminary structural configuration rather than during the fabrication process itself

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If nanopores are fabricated before integration into microfluidic devices, then beam access is enabled, but handling risks and wetting issues arise when transitioning to aqueous solutions

Engineering Contradiction:
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent performs preliminary integration of the membrane into the microfluidic device structure before nanopore fabrication. The membrane is pre-mounted within the sealed microfluidic channel network, creating a protected environment that eliminates handling risks and prevents wetting issues during subsequent nanopore formation and operation in aqueous solutions

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent provides beforehand protection by sealing the membrane within the microfluidic device structure prior to nanopore fabrication. This preliminary encapsulation cushions the membrane against mechanical damage and uncontrolled environmental exposure, ensuring reliability when the device transitions to aqueous solution operation

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

4Object-affected harmful factors

If microfluidic channel dimensions are reduced to minimize electrical noise, then noise is reduced, but alignment and integration challenges increase

Engineering Contradiction:
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent replaces mechanical alignment systems with electric field-based positioning. In reduced-dimension microfluidic channels, the electric field naturally concentrates at the membrane location, enabling precise nanopore formation without complex mechanical alignment mechanisms, thus reducing noise while maintaining integration simplicity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fabrication approach from mechanical beam-based methods to electric field-based controlled breakdown. This parameter change enables effective nanopore fabrication in highly confined microfluidic channels where mechanical alignment would be prohibitively complex, allowing noise reduction through miniaturization without sacrificing integrability

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

CBD facilitates the reliable formation of nanopores with precise control over size and location, reducing noise and enhancing the integration of nanopore sensors within microfluidic devices, expanding their range of applications and improving the robustness of lab-on-a-chip devices.

Implementation Method 1

a dielectric breakdown event is induced in the supporting intact insulating membrane resulting in the formation of a single nanopore

Methodology Applied
Scientific EffectDielectric breakdown: Avalanche Breakdown

Implementation Method 2

charged biomolecules such as DNA and proteins that are electrophoretically driven through the nanopore

Methodology Applied
Scientific EffectElectrophoresis: Electrophoresis

Data Source

PatentEP3828540B1Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
Publication Date: 2024.04.17
  • EP3828540B1 patent drawingFigure 1
  • EP3828540B1 patent drawingFigure 2A~2B
  • EP3828540B1 patent drawingFigure 3A~3C

AI summary

An apparatus for fabricating one or more nanopores in a membrane is disclosed. Nanopore arrays are fabricated by controlled breakdown in solid-state membranes integrated within polydimethylsiloxane (PDMS) microfluidic devices. This technique enables the scalable production of independently addressable nanopores. By confining the electric field within the microfluidic architecture, nanopore fabrication is precisely localized and electrical noise is significantly reduced during sensing. (Fig. 1)