Nanopore Formation via Two-Stage Voltage Control

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Solution Overview

Problem

Existing methods for forming nanopores on membranes with thicknesses greater than 5 nm are unstable and often fail to produce a single nanopore, leading to reduced accuracy in molecule and particle detection and analysis.

Innovation Solution

A two-stage voltage application method where a first step forms a thin film portion in the membrane, followed by a second step that applies a lower voltage to create a stable nanopore, allowing for precise control of nanopore formation across various membrane thicknesses and materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a high voltage is continuously applied to form a nanopore through dielectric breakdown, then the manufacturing cost and throughput are significantly reduced, but it becomes almost impossible to form a single nanopore in membranes with thickness larger than 5 nm

Engineering Contradiction:
Improvemanufacturing throughputVSAvoidnanopore formation stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The continuous high voltage application process is segmented into two distinct stages: a first stage with higher voltage to initiate dielectric breakdown and form a thin film portion, and a second stage with lower voltage to complete nanopore formation. This segmentation allows controlled progression through the breakdown process, enabling reliable single nanopore formation in thicker membranes while maintaining the benefits of continuous processing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first stage of voltage application performs a preliminary action by creating a thin film portion through initial dielectric breakdown before the second stage completes the nanopore formation. This preliminary thin film creation facilitates more controlled and reliable subsequent nanopore formation, especially in membranes thicker than 5 nm.

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If a high voltage is continuously applied to form a nanopore, then manufacturing cost is reduced, but the nanopore formation becomes unstable and multiple or no nanopores may form

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidsingle nanopore formation control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The voltage application is made dynamic by adjusting the voltage level between two stages: a higher voltage in the first stage to initiate breakdown, and a lower voltage in the second stage to complete nanopore formation. This dynamic voltage adjustment enables precise control over the nanopore formation process, ensuring single nanopore creation while maintaining manufacturing simplicity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The voltage parameter is changed between two distinct values during the formation process: a first voltage value for initiating dielectric breakdown and creating a thin film portion, and a second, lower voltage value for completing nanopore formation. This parameter change enables precise control over nanopore formation, ensuring single nanopore creation while keeping the manufacturing process simple.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the stable formation of a single nanopore in membranes of different thicknesses, improving the accuracy of molecule and particle detection by ensuring a consistent and controlled pore size, which is essential for applications like DNA sequencing and target counting in aqueous solutions.

Implementation Method 1

a method using a semiconductor substrate, a semiconductor material, and a semiconductor process has attracted attention... a transmission electron microscope (TEM) can be used as a device for the nanopore formation. In the TEM, a nanopore having a diameter of 10 nm or less can be formed by narrowing an irradiation area of an electron beam on a membrane and controlling energy or current

Methodology Applied
Scientific EffectDielectric breakdown: Avalanche Breakdown

Implementation Method 2

both the upper and lower chambers are provided with electrodes that are in contact with the electrolyte. A detection target to be measured is placed on one side of the chamber, a potential difference is given between the electrodes provided in both the chambers so that the detection target is electrophoresed to pass through the nanopore

Methodology Applied
Scientific EffectElectrophoresis: Electrophoresis

Data Source

PatentEP3722794B1Hole forming method and hole forming device
Publication Date: 2024.10.02 HITACHI HIGH TECH CORP
  • EP3722794B1 patent drawingFigure 1
  • EP3722794B1 patent drawingFigure 2(a)~3
  • EP3722794B1 patent drawingFigure 4~5

AI summary

Provided are a hole forming method and a hole forming apparatus capable of stably forming a single nanopore on a membrane. This hole forming method is a hole forming method for forming a hole in a film and includes: a first step of applying a first voltage between a first electrode and a second electrode, installed so as to sandwich the film provided in an electrolyte, and stopping the application of the first voltage when a current flowing between the first electrode and the second electrode reaches a first threshold current so as to form a thin film portion in a part of the film; and a second step of applying a second voltage between the first electrode and the second electrode after the first step so as to form a nanopore in the thin film portion.