Nanopore Formation via Cyclic Voltage and Current Threshold Control

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Solution Overview

Problem

The existing methods for forming nanopores in semiconductor substrates face challenges such as varying defect levels and currents, leading to inconsistent pore sizes, increased signal processing requirements, and difficulties in forming small nanopores with precise diameters, which complicates DNA sequencing and increases costs and complexity in parallelized systems.

Innovation Solution

A method involving sequential voltage applications with a low voltage to minimize defect-related currents, allowing for precise measurement and control of nanopore formation, using a control circuit to manage voltage and current thresholds, and a memory unit to store relations between pore sizes and current values, enabling uniform cutoff current values across membranes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a high voltage is continuously applied to form nanopores, then nanopore formation is achieved, but the current varies due to defect levels leading to inconsistent pore sizes

Engineering Contradiction:
Improvenanopore diameter consistencyVSAvoidcurrent stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies periodic voltage pulses instead of continuous voltage to form nanopores. The voltage is applied in multiple cycles, with each cycle consisting of a voltage application period followed by a measurement period. This periodic action allows the system to measure the current at specific intervals and stop the voltage application when the current reaches a threshold, thereby achieving consistent nanopore diameters despite variations in defect levels.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent implements a feedback mechanism where the current is continuously monitored during nanopore formation. When the current reaches a predetermined threshold value, the voltage application is automatically stopped. This feedback control ensures that nanopores with consistent diameters are formed across different membranes, compensating for variations in defect levels and current characteristics.

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If TEM apparatus is used to form nanopores, then precise nanopore formation is achieved, but processing time increases due to vacuuming and stabilization

Engineering Contradiction:
Improvenanopore diameter controlVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces the complex mechanical vacuum system of TEM apparatus with a simpler electrical field-based nanopore formation method. By applying voltage directly to the membrane in an aqueous environment, the system eliminates the need for vacuuming and stabilization procedures, thereby maintaining nanopore formation precision while significantly improving throughput and productivity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If signal processing is enhanced to handle varying currents, then measurement accuracy improves, but device complexity increases

Engineering Contradiction:
Improvecurrent measurement accuracyVSAvoidsignal processing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent performs preliminary characterization of the current-defect level relationship before actual nanopore formation. By establishing this relationship in advance and using it to set appropriate current thresholds, the system achieves accurate nanopore diameter control without requiring complex real-time signal processing algorithms during the formation process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies and cost-reduces nanopore formation, achieves precise control over pore diameters, and reduces signal processing complexity, enabling accurate and efficient DNA sequencing by minimizing defect-related currents and allowing uniform cutoff current values.

Implementation Method 1

When a high voltage is applied between both electrodes, charges break bonds in the film, and therefore the number of defect levels rapidly increases. The leakage current IPF that passes through the membrane increases accordingly.

Methodology Applied
Scientific EffectDielectric breakdown: Avalanche Breakdown

Implementation Method 2

charges having ions are conducted through the SiN membrane as a current that passes through the SiN membrane owing to the tunnel effect

Methodology Applied
Scientific EffectTunnel effect: Conduction (electrical)

Implementation Method 3

a current that is conducted through the SiN membrane via defect levels in the SiN membrane (these two types of currents that pass through a membrane are referred to as a tunnel current and a Pool-Frenkel current respectively)

Methodology Applied
Scientific EffectPool-Frenkel current: Pool-Frenkel Effect

Implementation Method 4

a power supply for applying a voltage between the first electrode and the second electrode

Methodology Applied
Scientific EffectVoltage application: Electric Field

Implementation Method 5

a measurement unit for measuring a value of a current obtained by applying the voltage

Methodology Applied
Scientific EffectCurrent measurement: Ohmmeter

Data Source

PatentUS11255022B2Hole forming method, measuring apparatus and chip set
Publication Date: 2022.02.22 HITACHI LTD
  • US11255022B2 patent drawing
  • US11255022B2 patent drawing
  • US11255022B2 patent drawing

AI summary

A pore forming method in which a pore is formed in such a way that a first voltage is applied between electrodes that are disposed with a film in an electrolytic solution therebetween; a second voltage, which is lower than the first voltage, is applied between the electrodes; a current that flows between the electrodes owing to the application of the second voltage is measured; it is judged whether a value of a current is equal to or larger than a predefined threshold; and if the value of the current is smaller than the threshold, the above sequence is repeated until a pore is formed. In this case, the second voltage is a voltage that makes the value (IPF) of the current flowing through the film practically 0. With the use of the above method, a nanopore is formed in the film simply, easily, and accurately.