Nanoporous AlN Layer for Light Extraction in III-Nitride LEDs

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Solution Overview

Problem

III-nitride light-emitting devices face significant light extraction efficiency losses due to total internal reflection at the interface between the optically denser nitride medium and air, resulting in a substantial percentage of light being trapped and unable to escape, which existing methods such as surface roughening and photonic crystals have not adequately addressed.

Innovation Solution

Incorporating a nanoporous nitride layer with randomly distributed nanopores into the light-emitting device structure, formed through epitaxial growth and subsequent modification, to reduce total internal reflection and enhance light extraction efficiency by disrupting the light escape cone constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a planar interface between nitride medium and air is used, then the device structure is simple, but light extraction efficiency is poor due to total internal reflection

Engineering Contradiction:
Improvedevice structureVSAvoidlight extraction efficiency
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent introduces a nanoporous layer with randomly distributed nanopores between the nitride medium and air interface. This porous structure disrupts the planar interface, enabling light to escape through multiple scattering paths and reducing total internal reflection. The nanopores act as optical antennas that enhance light extraction efficiency without significantly complicating the device structure.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The patent transitions from a two-dimensional planar interface to a three-dimensional nanoporous structure. By introducing vertical nanopores that extend through the interface layer, the patent creates additional optical paths in the vertical dimension, allowing light to escape at angles that would otherwise be blocked by total internal reflection at a planar interface.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Loss of energy

If surface roughening is applied to reduce total internal reflection, then light extraction efficiency improves, but manufacturing complexity increases

Engineering Contradiction:
Improvelight extraction efficiencyVSAvoidmanufacturing process
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The patent changes the physical-chemical parameters of the interface layer by forming a nanoporous structure through controlled epitaxial growth and chemical modification. This transforms a dense planar surface into a nanoporous structure with specific pore size distribution, achieving enhanced light extraction through material parameter modification rather than mechanical roughening.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The nanoporous layer acts as an intermediary between the nitride medium and air. This intermediate layer with graded refractive index and porous structure mediates the optical transition, gradually matching the refractive index difference and reducing total internal reflection without requiring direct contact between the nitride and air interfaces.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Loss of energy

If photonic crystals are incorporated to enhance light extraction, then light extraction efficiency improves, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvelight extraction efficiencyVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent uses a nanoporous layer with randomly distributed pores as a simpler alternative to photonic crystals. The random porous structure provides sufficient light extraction enhancement through multiple scattering mechanisms without requiring the precise periodic structures and complex fabrication processes needed for photonic crystal implementation.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanoporous layer significantly improves light extraction efficiency by increasing the percentage of light that can escape from the nitride medium into air, overcoming the limitations of refractive index differences and enhancing the performance of both UV and visible LEDs.

Implementation Method 1

total internal reflection (TIR) takes place at the interface if the angle of incidence is over a critical angle

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

Incorporating a nanoporous nitride layer with randomly distributed nanopores into the light-emitting device structure, formed through epitaxial growth and subsequent modification, to reduce total internal reflection and enhance light extraction efficiency by disrupting the light escape cone constraints

Methodology Applied
Scientific EffectLight scattering: Scattering

Data Source

PatentUS9048387B2Light-emitting device with improved light extraction efficiency
Publication Date: 2015.06.02 MAANSHAN JASON SEMICON CO LTD
  • US9048387B2 patent drawing
  • US9048387B2 patent drawing
  • US9048387B2 patent drawing

AI summary

A light emitting device with improved light extraction efficiency includes an n-type layer, a p-type layer, an active region sandwiched between the n-type layer and the p-type layer, a characteristic AlGaN layer over which the n-type layer is formed, and an AlN layer on which the characteristic AlGaN layer is formed. The characteristic AlGaN layer has gradually enlarging bandgap width from that of the n-type layer to that of the AlN layer in the direction pointing from the n-type layer to the AlN layer. The light-emitting device may further include a nanoporous AlN layer over which the AlN layer is formed.