III-V Nanoridge Waveguide Side-Wall Contact Injection

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Solution Overview

Problem

Current silicon photonics systems face challenges in integrating high-quality III-V semiconductor material waveguides due to limited current injection efficiency and excessive non-radiative recombination in III-V semiconductor nanoridge waveguide structures.

Innovation Solution

A III-V semiconductor nanoridge waveguide structure with a narrow supporting base and a freestanding wider body portion, incorporating a PIN diode and heterojunctions with active quantum wells or quantum dots, where the upper contact is positioned on the side wall or top side of the wider body portion for enhanced electron and hole injection, reducing non-radiative recombination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the upper contact is positioned at the top surface of the nanoridge waveguide, then the manufacturing process is simple, but the current injection efficiency is limited and non-radiative recombination is excessive

Engineering Contradiction:
Improvecontact fabrication simplicityVSAvoidcurrent injection efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The upper contact is repositioned from the top surface to the side wall of the nanoridge waveguide, utilizing the vertical side surface as a new contact dimension. This side-wall contact configuration enables more effective current injection into the active region while avoiding surface recombination losses, thus improving injection efficiency without significantly complicating the manufacturing process

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The contact structure is optimized by creating different contact configurations for different regions: the lower contact remains at the bottom surface while the upper contact is positioned on the side wall. This local differentiation allows each contact to be optimally positioned for its specific function, with the side-wall contact providing efficient carrier injection while the bottom contact provides stable electrical connection

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If the nanoridge waveguide uses a narrow supporting base with freestanding wider body portion, then the optical confinement is improved, but the current injection efficiency is reduced

Engineering Contradiction:
Improveoptical confinement qualityVSAvoidcurrent injection efficiency
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The current injection path is extended from the top surface to the side wall of the nanoridge, utilizing the vertical dimension. This allows the contact to reach the active region more effectively despite the narrow base width, maintaining good optical confinement while achieving efficient current injection through the side-wall contact geometry

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the upper contact is positioned on the side wall of the freestanding body portion, then the current injection efficiency is improved and non-radiative recombination is reduced, but the device complexity increases

Engineering Contradiction:
Improvecurrent injection efficiencyVSAvoidwaveguide structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The side-wall contact is implemented only in the critical region where current injection is needed, rather than complicating the entire waveguide structure. This localized approach improves injection efficiency at the contact point while maintaining the simplicity of the overall nanoridge waveguide design elsewhere

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves current injection efficiency, reduces non-radiative recombination, and enables efficient optical gain and absorption, achieving better light generation and absorption efficiencies while minimizing optical loss.

Implementation Method 1

The III-V semiconductor waveguide comprises a PIN diode... efficient electron and hole injection in the quantum well active layers

Methodology Applied
Scientific EffectP-N junction carrier injection: Diode

Implementation Method 2

at least one heterojunction incorporated in the III-V semiconductor waveguide core... active quantum wells or quantum dots... efficient optical gain or optical absorption

Methodology Applied
Scientific EffectQuantum well radiative recombination: Luminescence

Implementation Method 3

III-V semiconductor nanoridge waveguide structures... wave guidance... good overlap of the well-confined mode field

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentEP3506000B1Iii-v semiconductor waveguide nanoridge structure
Publication Date: 2020.10.07 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP3506000B1 patent drawingFigure 1
  • EP3506000B1 patent drawingFigure 2
  • EP3506000B1 patent drawingFigure 3~5

AI summary

A III-V semiconductor waveguide nanoridge structure (100) is described having a narrow supporting base (101) with a freestanding wider body portion (102) on top. The III-V waveguide (100) comprises a PIN diode (103). The waveguide comprises a III-V semiconductor waveguide core (110) formed in the freestanding wider body portion (102), at least one heterojunction (118) incorporated in the III-V semiconductor waveguide core (110), a bottom doped region of a first polarity positioned at a bottom of the narrow supporting base (101) forming a lower contact (112), and an upper doped region of a second polarity forming an upper contact (122). The upper contact (122) is positioned at at least one side wall of the freestanding wider body portion (102).