Hybrid Nanosheet Cell Rows for Single-Mask APR Placement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The manufacturing of integrated circuits (ICs) with nanosheet structures is challenging due to the complexity of aligning standard cells with power rails and reference rails, and the need for multiple masks to create point touch patterns, which increases costs.
Innovation Solution
The use of hybrid nanosheet structures with adjusted numbers of nanosheets in adjacent rows, arranged to have a 1× cell height without point touches, allowing for the use of a single immersion mask, thereby reducing manufacturing complexity and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If standard cells are aligned with power rails and reference rails using traditional methods, then manufacturing precision is maintained, but device complexity and manufacturing cost increase due to multiple masks and point touch patterns
Solution Approach 1:
The patent segments the nanosheet structure into hybrid configurations where adjacent rows have different numbers of nanosheets (e.g., 2 nanosheets in one row, 3 in the next). This segmentation allows each row to be independently optimized and manufactured without requiring complex point touch patterns, thereby simplifying the manufacturing process while maintaining alignment precision through the inherent structure of the hybrid nanosheet cells
Solution Approach 2:
The patent transitions from traditional two-dimensional planar alignment to a three-dimensional hybrid nanosheet structure where vertical stacking and horizontal arrangement work together. By utilizing the vertical dimension for nanosheet stacking and the horizontal dimension for row arrangement with varying nanosheet counts, the design achieves precise alignment without requiring multiple masks, thus improving ease of manufacture while maintaining manufacturing precision
2Manufacturing precision
If multiple masks are used to create point touch patterns, then alignment precision is achieved, but manufacturing cost and process complexity increase
Solution Approach 1:
The patent extracts and eliminates the need for complex point touch patterns by adopting hybrid nanosheet cell structures. By removing the requirement for point touch patterns, the design no longer needs multiple masks for their creation, thereby reducing manufacturing process complexity while maintaining alignment precision through the inherent structure of the hybrid cells
Solution Approach 2:
The patent changes the structural parameter of nanosheet arrangement from uniform patterns requiring point touches to hybrid patterns with varying nanosheet counts per row. This parameter change in the cell structure allows for simplified manufacturing with fewer masks while achieving the necessary alignment precision through the modified geometric configuration
3Ease of manufacture
If hybrid nanosheet structures with adjusted nanosheet counts are used, then manufacturing cost and process complexity are reduced, but manufacturing precision and alignment accuracy may be compromised
Solution Approach 1:
The patent introduces asymmetry in the nanosheet structure by having adjacent rows with different numbers of nanosheets (e.g., 2 in one row, 3 in the next). This asymmetric hybrid configuration simplifies manufacturing by eliminating point touch patterns while maintaining alignment precision through the deliberate asymmetric design that inherently positions power rails and reference rails correctly without requiring additional alignment steps
Data Source
AI summary
A device including first nanosheet structures each including a first number of nanosheets, second nanosheet structures each including a second number of nanosheets that is different than the first number of nanosheets, and a plurality of rows including first rows and second rows. Where each of the first nanosheet structures is in a respective one of the first rows, each of the second nanosheet structures is in a respective one of the second rows, at least two of the first rows are adjacent one another, and at least two of the second rows are adjacent one another.