Nanostructure Field Emission Cathode with Coaxial Gate

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Solution Overview

Problem

Conventional field emission devices, such as Spindt cathodes and carbon nanotube (CNT) emitters, face limitations in stability, vacuum requirements, and control over emission current density and uniformity, which hinder their practical application in high-resolution electron optical devices.

Innovation Solution

The development of nanostructure field emission devices with a resistive layer, connection pad, and coaxial gate electrodes, where the nanostructure elements like CNTs, ZnO, or TiO2 are grown on a resistive layer with a connection pad, and a coaxial gate structure is formed around them, enhancing stability and control over emission current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single needle shape emitter with sharp tip is used, then high resolution electron emission is achieved, but total emission current is limited due to tiny emission area

Engineering Contradiction:
ImproveresolutionVSAvoidtotal emission current
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The cathode is divided into multiple individual needle-shaped emitters arranged in an array, each with a sharp tip for high resolution emission. By segmenting the emission surface into many independent emitters, the patent simultaneously maintains high resolution at each tip while achieving high total current through the cumulative effect of all emitters in the array.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If a metal emitter array is used to increase total emission current, then emission current is improved, but lifetime is reduced to just a few seconds in medium level vacuum

Engineering Contradiction:
Improvetotal emission currentVSAvoidlifetime
Core Design Contradiction:
Quantity of substanceVSDuration of action of stationary object

Solution Approach 1:

The patent changes the material parameter from metal to carbon-based nanotubes, which have fundamentally different properties including higher chemical stability and resistance to vacuum degradation. This material substitution allows the emitters to maintain high current emission capability while extending operational lifetime from seconds to much longer durations in medium level vacuum environments.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If carbon nanotube emitters are grown on resistive materials, then stability in medium vacuum is improved, but proper function is not achieved

Engineering Contradiction:
ImprovestabilityVSAvoidproper function
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent employs a composite structure where carbon nanotube emitters are grown on a substrate with specific electrical properties. The composite design integrates the stability advantages of carbon nanotubes in medium vacuum with the electrical conductivity needed for proper function, creating a hybrid system that achieves both reliability and operational effectiveness.

Inventive Principle:
Principle #40Composite materials

4Quantity of substance

If conventional field emission devices are used, then emission current is achieved, but control over emission current density and uniformity is poor

Engineering Contradiction:
Improveemission currentVSAvoidcontrol over emission current density and uniformity
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

Each needle-shaped emitter in the array is designed with identical geometric parameters and sharp tip characteristics, ensuring uniform local emission properties across all emitters. This local quality control, combined with the array configuration, enables precise control over overall emission current density and uniformity, as each emitter contributes equally to the total emission.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the robustness and stability of field emission devices, allowing for higher emission current density, reduced gate voltage requirements, and longer operational stability without the need for ultra-high vacuum conditions, making them suitable for various electronic applications.

Implementation Method 1

Field emission cathodes have been successfully used in high resolution electron optical devices

Methodology Applied
Scientific EffectField emission: Electron Avalanche

Data Source

PatentUS9053890B2Nanostructure field emission cathode structure and method for making
Publication Date: 2015.06.09 UNIV HEALTH NETWORK
  • US9053890B2 patent drawing
  • US9053890B2 patent drawing
  • US9053890B2 patent drawing

AI summary

Various embodiments are described herein for nanostructure field emission cathode structures and methods of making these structures. These structures generally comprise an electrode field emitter comprising a resistive layer having a first surface, a connection pad having a first surface disposed adjacent to the first surface of the resistive layer, and a nanostructure element for emitting electrons in use, the nanostructure element being disposed adjacent to a second surface of the connection pad that is opposite the first surface of the connection pad. Some embodiments also include a coaxial gate electrode that is disposed about the nanostructure element.