Nanostructure Cryogenic Pump Blades for Ultra-High Vacuum
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Solution Overview
Problem
Achieving and maintaining ultra-high vacuum conditions in semiconductor manufacturing is challenging due to residual gases and impurities that contaminate the vacuum system, particularly because gases permeate through the chamber walls, and existing cryogenic pumps have limitations in regeneration cycles and condensation efficiency.
Innovation Solution
Incorporating nanostructure materials with high absorption characteristics, such as carbon nanotubes, into the cryogenic pump's blade array, mixed with a fixed glue layer for enhanced thermal conductivity, to improve gas trapping and regeneration capabilities, thereby achieving lower vacuum levels and extending regeneration cycles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If traditional cryogenic pumps are used to remove gases from vacuum chamber, then vacuum pressure is reduced, but regeneration cycles are limited and condensation efficiency is insufficient
Solution Approach 1:
The patent applies composite materials by combining nanostructure materials (such as carbon nanotubes) with traditional cryogenic pump components. The nanostructure material is integrated into the blade array structure, creating a composite system that leverages both the cryogenic cooling capability and the high surface area-to-volume ratio of nanostructures for enhanced gas absorption and extended regeneration cycles
2Quantity of substance
If cryogenic pump operates at low temperature to trap particles by condensation, then gas removal is improved, but thermal conductivity of fixed glue layer becomes insufficient
Solution Approach 1:
The patent applies parameter changes by modifying the thermal conductivity parameter of the fixed glue layer through the incorporation of nanostructure materials. The nanostructure material's superior thermal conductivity properties compensate for the thermal insulation requirements of cryogenic operation, enabling efficient heat transfer from the blades to the trapped particles while maintaining low operating temperatures
3Manufacturing precision
If vacuum chamber pressure is reduced to ultra-high vacuum regime, then product contamination is reduced, but gas permeation through chamber walls increases
Solution Approach 1:
The patent applies porous materials by utilizing the unique structure of nanostructure materials with controlled porosity. These materials provide high surface area for gas adsorption while maintaining structural integrity, enabling the system to achieve ultra-high vacuum levels and counteract the effects of gas permeation through enhanced absorption capacity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of nanostructure materials significantly enhances the absorption and desorption efficiency of gases, allowing for the attainment of ultra-high vacuum levels and longer regeneration cycles, effectively addressing the limitations of traditional cryogenic pumps by improving thermal conductivity and activation energy for adsorption and desorption processes.
Implementation Method 1
The nanostructure material is arranged on the second plurality of blades and absent from the first plurality of blades
Implementation Method 2
Cryogenic pumps trap particles by condensing them on a cold surface
Implementation Method 3
mixed with a fixed glue layer for enhanced thermal conductivity
Implementation Method 4
improve gas trapping and regeneration capabilities
Data Source
AI summary
Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.