Nanostructure Sensor Array with Nanocluster Functionalization

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Solution Overview

Problem

Conventional metal-oxide based thin film sensors lack selectivity and require high operating temperatures, making them unreliable and inefficient for real-time detection of chemical species in air, particularly for distinguishing between different classes of compounds like aromatic compounds and explosives.

Innovation Solution

Development of semiconductor nanostructures decorated with metal and/or metal-oxide nanoclusters that enable light-induced room-temperature sensing, providing high selectivity and sensitivity, with the ability to distinguish between various analytes, including explosives, using a hybrid chemiresistive architecture that operates at temperatures below 100°C.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional metal-oxide based thin film sensors are used, then they can detect chemical species in air, but they lack selectivity and require high operating temperatures

Engineering Contradiction:
ImproveselectivityVSAvoidoperating temperature
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The sensor array is segmented into multiple sensing elements (e.g., 4x4=16 sensors), each functionalized with different metal-oxide nanoclusters that respond to different classes of analytes. This segmentation allows the system to distinguish between various chemical species through pattern recognition, achieving high selectivity without requiring high operating temperatures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses composite structures combining metal-oxide nanoclusters (such as TiO2, ZnO, SnO2) deposited on semiconductor nanostructures. These composite materials enable room-temperature operation while maintaining high selectivity through the specific chemical properties of different metal-oxide components that respond differently to various analyte classes.

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional metal-oxide based thin film sensors are used, then they can operate continuously, but they lack reliability due to high temperature requirements

Engineering Contradiction:
ImprovereliabilityVSAvoidoperating temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The invention changes the operating temperature parameter from high temperatures (typically 200-400°C for conventional sensors) to room temperature or near-room temperature operation. This parameter change is achieved through the use of metal-oxide nanoclusters with specific bandgap energies that enable thermal excitation at lower temperatures, thereby improving reliability and reducing power consumption while maintaining continuous operation capability.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If semiconductor nanostructures with metal-oxide nanoclusters are used, then selectivity and sensitivity are improved, but device complexity increases

Engineering Contradiction:
Improvedetection precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor array uses identical semiconductor nanostructure templates for all sensing elements, with the only variation being the specific metal-oxide nanocluster composition. This universal template approach simplifies fabrication while achieving multi-functionality through different nanocluster functionalizations that respond to different analyte classes (explosives, aromatic compounds, toxic gases, etc.).

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention employs replicated sensor elements with identical geometric structures and material compositions, varying only in the specific metal-oxide nanocluster type. This copying approach allows for scalable fabrication and simplifies the manufacturing process while maintaining high detection precision through the collective response of multiple identical sensors functionalized with different materials.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves highly selective and sensitive detection of target analytes at room temperature with fast response and recovery times, capable of detecting a wide range of concentrations and humidity levels, making it suitable for real-world applications such as explosive detection.

Implementation Method 1

metal-oxide nanoclusters that enable light-induced room-temperature sensing

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

light-induced room-temperature sensing

Methodology Applied
Scientific EffectPhotoconductivity: Photoconductivity

Data Source

PatentUS10908138B2Device having a array of sensors on a single chip
Publication Date: 2021.02.02 UNIV OF MARYLAND
  • US10908138B2 patent drawing
  • US10908138B2 patent drawing
  • US10908138B2 patent drawing

AI summary

A nanostructure sensing device comprises a semiconductor nanostructure having an outer surface, and at least one of metal or metal-oxide nanoparticle clusters functionalizing the outer surface of the nanostructure and forming a photoconductive nanostructure/nanocluster hybrid sensor enabling light-assisted sensing of a target analyte.