Nanostructured Non-Polarizing Beamsplitter for Broadband Uniformity

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Solution Overview

Problem

Designing beamsplitters for broadband applications that provide a selected beamsplitting ratio with high spatial uniformity and low diffraction across a wide range of wavelengths is challenging, as existing solutions suffer from high absorption or limited wavelength suitability.

Innovation Solution

A nanostructured beamsplitter with reflective structures on a transparent substrate, where the separation distances between structures are smaller than the cutoff wavelength, allowing for efficient splitting of incident light into reflected and transmitted beams based on the ratio of reflective to non-reflective surface areas, maintaining low diffraction losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional beamsplitter coatings are used to achieve broadband performance, then the spectral width increases, but the spatial uniformity and diffraction control deteriorate

Engineering Contradiction:
Improvespectral widthVSAvoidspatial uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The beamsplitter surface is segmented into discrete reflective structures (pillars, posts, or patterns) rather than using a continuous coating. This segmentation allows independent control of reflective and transmissive areas, enabling broadband operation while maintaining spatial uniformity through appropriate structure design and spacing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate are assigned different optical functions through the distributed reflective structures. The local reflective property is controlled by the presence/absence and geometry of structures at each location, while the overall spatial uniformity is achieved through statistical distribution or periodic patterns.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If reflective structures are made larger or more densely packed to improve beamsplitting ratio control, then the beamsplitting ratio precision improves, but diffraction losses increase

Engineering Contradiction:
Improvebeamsplitting ratioVSAvoiddiffraction losses
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The dimensions, spacing, and geometric parameters of the reflective structures are optimized to satisfy the sub-wavelength criterion. By controlling these parameters to be smaller than the operating wavelength, diffraction is suppressed while the beamsplitting ratio is precisely controlled through the reflective area fraction.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The potential harmful effect of diffraction from periodic structures is converted into a benefit by deliberately designing the structure spacing to be sub-wavelength. This transforms what would normally cause diffraction orders into a regime where only the zeroth order propagates, eliminating diffraction losses while maintaining precise beamsplitting control.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If the beamsplitter is designed for narrowband applications, then spatial uniformity and low diffraction are achieved, but the spectral coverage is limited

Engineering Contradiction:
Improvespatial uniformityVSAvoidspectral coverage
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The reflective structures are designed with dimensions and spacing that satisfy the sub-wavelength condition across a broad spectral range. This universal design allows the same structure to function effectively across multiple wavelengths, achieving both spatial uniformity and broadband coverage simultaneously.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanostructured beamsplitter achieves broadband performance with high spatial uniformity, suitable for various beam sizes and applications, by minimizing diffraction losses and maintaining a consistent beamsplitting ratio across different wavelengths.

Implementation Method 1

the reflective structures split incident light having wavelengths above the selected cutoff wavelength into a reflected beam formed from portions of the incident light reflected from the reflective structures

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a transmitted beam formed from portions of the incident light transmitted through the substrate

Methodology Applied
Scientific EffectTransmission: Refraction

Implementation Method 3

separation distances between neighboring reflective structures are smaller than the cutoff wavelength such that the power of non-zero diffraction orders of the incident light having wavelengths above the selected cutoff wavelength is maintained below a selected tolerance

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS10976562B2Nano-structured non-polarizing beamsplitter
Publication Date: 2021.04.13 KLA CORP
  • US10976562B2 patent drawing
  • US10976562B2 patent drawing
  • US10976562B2 patent drawing

AI summary

A beamsplitter includes a substrate formed from a material transparent to wavelengths of light at least above a selected cutoff wavelength and reflective structures distributed across a surface of the substrate. The reflective structures split incident light having wavelengths above the selected cutoff wavelength into a reflected beam formed from portions of the incident light reflected from the reflective structures and a transmitted beam formed from portions of the incident light transmitted through the substrate. A splitting ratio of a power of the reflected beam to a power of the transmitted beam is based on a ratio of surface area of the reflective surfaces to an area of the incident light on the substrate. Separation distances between neighboring reflective structures are smaller than the cutoff wavelength such that diffracted power of the incident light having wavelengths above the selected cutoff wavelength is maintained below a selected tolerance.