Nanowire Formation via Anodic Oxidation with Protruding Structures
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Solution Overview
Problem
Current methods for forming nanowires using anodic oxidation face challenges in achieving uniform oxide growth and high aspect ratios, leading to inconsistent nanowire formation and limited control over nanowire dimensions.
Innovation Solution
The process involves immersing a cathode and anode electrode in an electrolytic solution, with the anode electrode featuring protruding structures that undergo anodic oxidation, allowing for controlled oxide growth and formation of nanowires with specific dimensions by managing electric field distribution and resistance changes during the oxidation process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If anodic oxidation is performed to form nanowires, then nanowire formation is achieved, but uniform oxide growth and high aspect ratios are difficult to achieve
Solution Approach 1:
Protruding structures are formed on the anode electrode surface before the anodic oxidation process. These pre-formed protrusions serve as controlled nucleation sites that guide subsequent oxide growth, ensuring uniform nanowire formation with consistent dimensions and high aspect ratios.
Solution Approach 2:
The anode electrode surface is engineered with localized protruding structures that create non-uniform electric field distribution during anodic oxidation. This localized structural modification enables controlled oxide growth at specific locations, achieving uniform nanowire dimensions and high aspect ratios through spatially differentiated growth conditions.
2Manufacturing precision
If conventional anodic oxidation is used, then oxide growth occurs, but control over nanowire dimensions is limited
Solution Approach 1:
The anodic oxidation process utilizes controlled variations in electrical parameters (voltage, current density, pulse duration) to precisely regulate oxide growth rates and nanowire dimensions. By dynamically adjusting these parameters during the oxidation process, consistent nanowire formation with high aspect ratios is achieved while maintaining manageable process control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the consistent formation of nanowires with precise dimensions and high aspect ratios, overcoming previous inconsistencies and allowing for the fabrication of advanced semiconductor devices.
Implementation Method 1
Anodic oxidation includes an accelerated electrochemical oxidation process. For example, a cathode electrode and an anode electrode are immersed in an electrolytic solution and connected electrically to a power supply. Oxides can be grown at the anode electrode at room temperature.
Implementation Method 2
an accelerated electrochemical oxidation process. For example, a cathode electrode and an anode electrode are immersed in an electrolytic solution and connected electrically to a power supply.
Data Source
AI summary
Structures, devices and methods are provided for forming nanowires on a substrate. A first protruding structure is formed on a substrate. The first protruding structure is placed in an electrolytic solution. Anodic oxidation is performed using the substrate as part of an anode electrode. One or more nanowires are formed in the protruding structure. The nanowires are surrounded by a first dielectric material formed during the anodic oxidation.