Nanowire Multispectral Imaging Array Thermal Isolation

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Solution Overview

Problem

Conventional microbolometer infrared detectors face challenges in achieving high frame rates and uniformity across large pixel counts due to manufacturing variations and thermal isolation issues, limiting their effectiveness in multispectral imaging applications.

Innovation Solution

A nanowire multispectral imaging array system is developed, where nanowires replace traditional microbridge elements, allowing for scalable antenna sizes and reduced thermal time constants, enhancing read-out rates and manufacturability by integrating nanowires between antennas on a dielectric substrate, covering a broad spectral range from 0.8-54 THz.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional microbridge structures are used for thermal isolation, then thermal sensitivity is improved, but manufacturing precision and uniformity deteriorate due to variations across large pixel counts

Engineering Contradiction:
Improvethermal sensitivityVSAvoiduniformity across pixel counts
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent extracts the thermal sensing function from the complex microbridge structure and concentrates it into a simple nanowire element. The nanowire is suspended between antennas, removing the need for elaborate microbridge structures while maintaining thermal isolation. This simplification reduces manufacturing variability and improves uniformity across large pixel arrays.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the physical parameters of the thermal sensing element from micrometer-scale microbridges to nanometer-scale nanowires. This parameter change in dimensions fundamentally improves manufacturing precision and uniformity while maintaining or enhancing thermal sensitivity due to the nanowire's superior thermal isolation properties.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If larger antenna sizes are used to cover broader spectral ranges, then spectral coverage is improved, but device complexity increases

Engineering Contradiction:
Improvespectral range coverageVSAvoidantenna size variations
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements multi-functionality by designing antennas of different sizes within the same array to detect different spectral ranges. Each antenna-nanowire pair functions as an independent sensing unit that can be tuned to specific frequencies, allowing a single device to perform multiple spectral detection functions simultaneously.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent segments the imaging array into multiple antenna-nanowire units with different antenna sizes. Each segment is optimized for a specific spectral range, and the segments are integrated into a unified array structure. This segmentation approach manages device complexity by organizing different功能的 elements in a systematic manner.

Inventive Principle:
Principle #1Segmentation

3Productivity

If faster read-out rates are achieved by reducing thermal time constants, then frame rate is improved, but sensitivity to ambient thermal interference worsens

Engineering Contradiction:
Improveframe rateVSAvoidsensitivity to thermal interference
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies dynamics by making the nanowire suspended structure capable of rapid thermal response. The suspended nanowire can quickly exchange heat with the antennas while maintaining isolation from the substrate, enabling fast read-out rates. The dynamic thermal coupling between nanowire and antennas allows rapid frame rates without sacrificing sensitivity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The nanowire acts as an intermediary between the antennas and the substrate. It provides a controlled thermal pathway that allows fast heat exchange for rapid read-out while maintaining thermal isolation from the substrate to prevent ambient thermal interference. This intermediary role resolves the contradiction between speed and sensitivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanowire-based system achieves high frame rates for high pixel counts, improves spectral range coverage, and reduces manufacturing variations, making the vacuum package more manufacturable while maintaining sensitivity and accuracy in infrared and Terahertz detection.

Implementation Method 1

A nanowire multispectral imaging array system includes a substrate and a plurality of antennas located with respect to one another on the substrate... nanowires located one or more of the gaps... such that the nanowire(s) in communication with the antennas and the substrate

Methodology Applied
Scientific EffectBolometer effect: Bolometer

Implementation Method 2

Infrared (IR) detectors are often utilized to detect fires, overheating machinery, planes, vehicles, people, and any other objects that emit thermal radiation

Methodology Applied
Scientific EffectThermal radiation detection: Thermal Radiation

Implementation Method 3

the nanowire(s) in communication with the antennas and the substrate comprise a multispectral imaging system in which the use of the nanowire(s) decreases the thermal time constant

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 4

decreasing the ambient gas cooling speed relative to the read out rate to increase the manufacturability of the multispectral imaging array system

Methodology Applied
Scientific EffectVacuum isolation: Vacuum

Data Source

PatentUS7786440B2Nanowire multispectral imaging array
Publication Date: 2010.08.31 HONEYWELL INTERNATIONAL INC
  • US7786440B2 patent drawing
  • US7786440B2 patent drawing
  • US7786440B2 patent drawing

AI summary

A multispectral imaging array system and method of forming the same. A substrate and a group of antennas can be located with respect to one another on the substrate, such that respective gaps are formed between each antenna group and wherein different antenna sizes may be used for different spectral ranges. Additionally, one or more nanowires can be located within one or more gaps among the respective gaps, such that the nanowires in communication with the antennas and the substrate comprise a multispectral imaging system in which the use of the nanowire(s) decreases the thermal time constant and therefore the read out rate from the antennas while decreasing the ambient gas cooling speed relative to the read out rate to increase the manufacturability of the multispectral imaging array system.