Transfer of Vertically Aligned Nanowires to Flexible Substrates

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Solution Overview

Problem

Current technologies face challenges in manufacturing efficient and cost-effective flexible devices with vertically aligned nanowires directly on flexible substrates, as high-temperature growth methods are not suitable and control over nanowire dimensions and density is difficult due to poor wetting properties of polymer substrates.

Innovation Solution

A method involving the use of an anodized alumina template to grow vertically aligned nanowires, which are then transferred onto a flexible substrate with a conductive interlayer to maintain alignment and density, using techniques like electrodeposition and sol-gel methods, followed by removal of the template to embed nanowires in a conductive interlayer on a flexible substrate like PDMS.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If high-temperature growth methods are used to grow vertically aligned nanowires, then nanowire quality and crystallinity are improved, but the method is not suitable for flexible substrates which cannot withstand high temperatures

Engineering Contradiction:
Improvenanowire alignment and densityVSAvoidsubstrate temperature
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The process is segmented into two independent stages: (1) growing vertically aligned nanowires on a rigid aluminum substrate at high temperature using AAO template, and (2) transferring the completed nanowire array to the flexible substrate at low temperature. This segmentation allows each stage to operate under optimal conditions without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The AAO template serves as an intermediary structure that enables nanowire growth under controlled conditions on a rigid substrate, then acts as a transfer medium to deliver the nanowires to the flexible substrate. The template mediates between the incompatible requirements of high-temperature growth and low-temperature flexible substrate compatibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If nanowires are grown directly on flexible substrates, then device integration is simplified, but control over nanowire dimensions and density is difficult due to poor wetting properties

Engineering Contradiction:
Improvedevice integrationVSAvoidnanowire dimension and density control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The AAO template is prepared in advance with precisely controlled pore dimensions, spacing, and orientation before nanowire growth. This preliminary structuring ensures that when nanowires grow within the template channels, they inherit the precise geometric control, achieving both high manufacturing precision and eventual ease of integration through the transfer process.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If vertically aligned nanowires are transferred onto flexible substrates, then the nanowires maintain alignment and density, but additional process steps are required compared to direct growth

Engineering Contradiction:
Improvenanowire alignment and densityVSAvoidnumber of process steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The nanowire growth process and the transfer process are merged into a single integrated workflow where the AAO template serves both as the growth substrate and the transfer vehicle. By combining these functions into one continuous process rather than separate operations, the overall device complexity is reduced despite the multiple stages involved.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of flexible devices with high-density, vertically aligned nanowires that maintain conductivity and mechanical properties, providing a direct electron transport path and maximizing surface area for energy conversion and sensing applications, overcoming the limitations of direct growth on flexible substrates.

Implementation Method 1

anodizing an aluminum film to form the AAO template on the aluminum substrate

Methodology Applied
Scientific EffectAnodizing: Anodising

Implementation Method 2

The plurality of vertically aligned nanowires inside the channels of the AAO template can be synthesized by electrodeposition

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Implementation Method 3

The plurality of vertically aligned nanowires inside the channels of the AAO template can be synthesized by electrodeposition, sol-gel, hydrothermal or chemical vapor deposition

Methodology Applied
Scientific EffectSol-gel: Sol

Implementation Method 4

The plurality of vertically aligned nanowires inside the channels of the AAO template can be synthesized by electrodeposition, sol-gel, hydrothermal or chemical vapor deposition

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 5

The interlayer can be deposited on the exposed surface of the AAO template and the exposed portion of the individual nanowires by e-beam deposition

Methodology Applied
Scientific EffectE-beam deposition: Electron Beam

Implementation Method 6

The interlayer can be deposited on the exposed surface of the AAO template and the exposed portion of the individual nanowires by e-beam deposition, thermal evaporation deposition, or sputter deposition

Methodology Applied
Scientific EffectThermal evaporation deposition: Evaporation

Implementation Method 7

The interlayer can be deposited on the exposed surface of the AAO template and the exposed portion of the individual nanowires by e-beam deposition, thermal evaporation deposition, or sputter deposition

Methodology Applied
Scientific EffectSputter deposition: Sputtering

Implementation Method 8

Charges can be applied to tips of the plurality of vertically aligned nanowires using an electrostatic repulsion technique

Methodology Applied
Scientific EffectElectrostatic repulsion: Electrostatics

Data Source

PatentUS10745816B2Transfer of vertically aligned ultra-high density nanowires onto flexible substrates
Publication Date: 2020.08.18 UNIV OF FLORIDA RESEARCH FOUNDATION INC
  • US10745816B2 patent drawing
  • US10745816B2 patent drawing

AI summary

Various examples are provided for vertically aligned ultra-high density nanowires and their transfer onto flexible substrates. In one example, a method includes forming a plurality of vertically aligned nanowires inside channels of an anodized alumina (AAO) template on an aluminum substrate, where individual nanowires of the plurality of vertically aligned nanowires extend to a distal end from a proximal end adjacent to the aluminum substrate; removing the aluminum substrate and a portion of the AAO template to expose a surface of the AAO template and a portion of the proximal end of the individual nanowires; depositing an interlayer on the exposed surface of the AAO template and the exposed portion of the individual nanowires; and removing the AAO template from around the plurality of vertically aligned nanowires embedded in the interlayer.