Nanowires Zone Reduces Thermal Stress on Chip Current Paths

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Solution Overview

Problem

Conventional chips are prone to damage from thermal stress caused by soldering and operation currents, leading to deformation, fracture, or lifting off the substrate, which is typically addressed by increasing the current path size, resulting in reduced chip density and increased manufacturing costs.

Innovation Solution

Surrounding the current path with nanowires structures that dissipate thermal stress, implemented through etching, electrochemical, or deposition processes, with depths ranging from 1 μm to 5 μm, to prevent damage and enhance operational life and rated current capacity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the size of the current path is increased to prevent thermal stress damage, then the reliability of the current path is improved, but the number of chips per wafer is reduced and manufacturing cost increases

Engineering Contradiction:
Improvecurrent path reliabilityVSAvoidchips per wafer
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies local quality by creating nanowires zones with specific structural properties (depth 1-5 μm, wire diameter 50-200 nm) only in regions adjacent to current paths where thermal stress concentration occurs. This localized structural modification provides stress relief precisely where needed without requiring overall enlargement of current paths, thereby maintaining chip density while improving reliability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent transitions from two-dimensional current path geometry to three-dimensional nanowires structures by etching vertical channels and filling them with conductive material. This dimensional change creates a complex 3D nanoscale structure that provides thermal stress management functionality without increasing the planar footprint, thus maintaining high chip per wafer count while improving current path reliability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Strength

If the size of the current path is increased to prevent thermal stress damage, then the current path can withstand higher thermal stress, but the manufacturing cost per chip increases

Engineering Contradiction:
Improvethermal stress resistanceVSAvoidmanufacturing cost
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The patent changes physical parameters by introducing nanowires with specific depth (1-5 μm) and wire diameter (50-200 nm) to achieve thermal stress resistance. These parameter changes create a structure that provides strength enhancement at the nanoscale level, allowing standard-sized current paths to withstand thermal stress without requiring size increases that would raise manufacturing costs.

Inventive Principle:
Principle #35Parameter changes

3Duration of action of stationary object

If nanowires structures are added to reduce thermal stress, then the operational life of the chip is prolonged, but the device complexity increases

Engineering Contradiction:
Improvechip operational lifeVSAvoidchip structure complexity
Core Design Contradiction:
Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the substrate into regions with nanowires zones adjacent to current paths. The nanowires themselves are segmented into discrete vertical structures with controlled depth and spacing. This segmented approach provides thermal stress relief functionality while maintaining a modular structure that can be integrated into existing chip designs without excessive complexity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanowires structure effectively reduces thermal stress, preventing current path damage, prolonging chip life, increasing rated current, and allowing for smaller current path sizes, thus increasing chip density and reducing manufacturing costs.

Implementation Method 1

by surrounding the current path with nanowires structures to dissipate the thermal stress caused by a current flowing through the current path

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS9997689B2Chip reducing thermal stress of current path thereon
Publication Date: 2018.06.12 NATIONAL TSING HUA UNIVERSITY
  • US9997689B2 patent drawing
  • US9997689B2 patent drawing
  • US9997689B2 patent drawing

AI summary

A chip reducing thermal stress of current path thereon, including: a substrate having at least one nanowires zone formed on a surface thereof; and at least one current path formed within the at least one nanowires zone on the surface of the substrate, wherein, the at least one nanowires zone has a function of reducing a thermal stress of the at least one current path.