Narrowed Pillar Interconnects Mitigate Thermomechanical Stress

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Solution Overview

Problem

Semiconductor packages face mechanical stress and potential cracking due to thermal expansion mismatches between the semiconductor die and the substrate during bonding and thermal cycling, leading to reliability issues and yield loss.

Innovation Solution

The implementation of interconnect structures with pillar structures featuring narrowed portions to increase flexibility and dissipate stress, reducing the transmission of thermomechanical stress to the semiconductor die, thereby enhancing package reliability and yield.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the semiconductor package is heated and cooled during bonding and thermal cycling, then the bond material is reflowed and attached to the substrate, but significant mechanical stress is induced between the semiconductor die and the substrate due to thermal expansion mismatch

Engineering Contradiction:
Improvebonding reliabilityVSAvoidthermomechanical stress
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The interconnect structure is divided into multiple segments including a pillar portion, a narrowed portion, and a pad portion. This segmentation allows each segment to have different mechanical properties, with the narrowed portion acting as a stress-absorbing element that accommodates thermal expansion differences between the semiconductor die and substrate during heating and cooling cycles.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The cross-sectional area of the interconnect structure is changed along its length, with the narrowed portion having a smaller cross-sectional area than the pillar and pad portions. This parameter change creates a gradient in stiffness that allows the structure to flex and absorb stress while maintaining electrical connectivity, reducing the transmission of thermomechanical stress to the bond pads.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the semiconductor package undergoes thermal cycling, then the bond material attaches to the substrate, but cracking occurs at the interface between the interconnect structures and the semiconductor die

Engineering Contradiction:
Improvepackage reliabilityVSAvoidcracking
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The narrowed portion is designed in advance as a stress-absorbing feature that acts as a cushion before stress can propagate to the bond pads. This pre-engineered weak point accommodates thermal expansion differences and mechanical stresses during thermal cycling, preventing stress concentration at the vulnerable interface between the interconnect structures and the semiconductor die.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The interconnect structure incorporates a flexible narrowed portion that can bend and deform to accommodate thermal expansion differences between components. This flexible section acts as a compliant element that absorbs stress during thermal cycling, preventing the rigid stress transmission that would otherwise cause cracking at the bond pad interface.

Inventive Principle:
Principle #30Flexible shells and thin films

3Ease of manufacture

If uniform pillar structures are used for interconnect, then manufacturing is simplified, but stress concentration occurs at the interface with the semiconductor die

Engineering Contradiction:
Improveinterconnect manufacturingVSAvoidstress concentration
Core Design Contradiction:
Ease of manufactureVSStress or pressure

Solution Approach 1:

Instead of using a uniform pillar structure throughout, the interconnect is designed with local quality variations: the narrowed portion has a different cross-sectional area than the pillar and pad portions. This local variation in geometry is strategically placed at the stress-prone interface region to provide stress absorption, while the rest of the structure maintains simpler dimensions for manufacturing.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The narrowed pillar structures effectively absorb and dissipate stress, reducing the likelihood of cracking and mechanical failure at the interface between the interconnect structures and the semiconductor die, thereby improving the reliability and yield of semiconductor packages.

Implementation Method 1

The narrowed pillar structures effectively absorb and dissipate stress

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

heating the semiconductor package and/or subsequently cooling the semiconductor package can induce significant mechanical stress between the semiconductor die and the substrate due to a mismatch in the coefficients of thermal expansion of these components

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS11676932B2Semiconductor interconnect structures with narrowed portions, and associated systems and methods
Publication Date: 2023.06.13 MICRON TECHNOLOGY INC
  • US11676932B2 patent drawing
  • US11676932B2 patent drawing
  • US11676932B2 patent drawing

AI summary

Semiconductor devices having interconnect structures with narrowed portions configured to mitigate thermomechanical stresses, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor package includes a semiconductor die and a pillar structure coupled to the semiconductor die. The pillar structure can include an end portion away from the semiconductor die, the end portion having a first cross-sectional area. The pillar structure can further include a narrowed portion between the end portion and the semiconductor die, the narrowed portion having a second cross-sectional area less than the first-cross-sectional area of the end portion. A bond material can be coupled to the end portion of the pillar structure.