NCF Thermocompression Die Stack for Reliable 3D Packaging

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Solution Overview

Problem

Current semiconductor packaging technologies face challenges in achieving high reliability and efficient integration of multiple core dies while maintaining compactness and low power consumption, particularly in three-dimensionally integrated devices.

Innovation Solution

A semiconductor package design that includes a buffer die, core dies stacked with non-conductive films (NCF) and molding layers, where the NCF bonds the core dies and forms a coplanar surface with the molding layers, enabling efficient electrical connections and thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple core dies are stacked vertically to achieve three-dimensional integration, then device integration and compactness are improved, but manufacturing complexity and reliability challenges increase

Engineering Contradiction:
Improvedevice integrationVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent divides the bonding process into two distinct stages: first bonding the buffer die to the first core die, then bonding the second core die to the first core die. This segmentation of the manufacturing process simplifies each individual bonding step while achieving the overall goal of three-dimensional integration, making the complex multi-die stacking process more manageable and reliable.

Inventive Principle:
Principle #1Segmentation

2Reliability

If non-conductive films are used for thermocompression bonding, then electrical isolation and bonding strength are improved, but process precision requirements increase

Engineering Contradiction:
Improvebonding strengthVSAvoidprocess precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent specifies precise parameter ranges for the thermocompression bonding process, including temperature (70-150°C), pressure (1-100 atm), and time (1 second to 1 hour). By defining these parameter ranges, the patent optimizes the bonding process to achieve strong electrical isolation and bonding strength while maintaining feasibility for manufacturing, thus balancing reliability with process precision requirements.

Inventive Principle:
Principle #35Parameter changes

3Strength

If molding layers are designed to completely surround core dies, then mechanical protection is improved, but thermal dissipation and electrical access are restricted

Engineering Contradiction:
Improvemechanical protectionVSAvoidthermal dissipation
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent designs the molding layer with differentiated regions: a first molding layer that surrounds the first core die for mechanical protection, and a second molding layer that surrounds the second core die but leaves certain areas exposed. This local differentiation allows the molding layer to provide mechanical protection where needed while maintaining thermal dissipation pathways and electrical access points, thus resolving the contradiction between protection and heat management.

Inventive Principle:
Principle #3Local quality

4Volume of moving object

If core dies are closely stacked to reduce package size, then form factor is improved, but heat accumulation and signal interference increase

Engineering Contradiction:
Improvepackage sizeVSAvoidheat accumulation
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The patent introduces non-conductive films as intermediary layers between the stacked core dies. These NCFs serve multiple functions: they provide electrical isolation to prevent signal interference between adjacent dies, facilitate thermal management by creating controlled thermal pathways, and enable mechanical bonding. This intermediary approach allows close stacking for compactness while mitigating heat accumulation and electromagnetic interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the reliability and integration of semiconductor packages by ensuring strong bonding between core dies and efficient electrical connections, while maintaining a compact form factor and low power consumption.

Implementation Method 1

a first non-conductive film (NCF) disposed between the first core die and the second core die and bonding the first core die and the second core die to each other

Methodology Applied
Scientific EffectThermocompression bonding:

Data Source

PatentUS20240063167A1Semiconductor package manufactured through a thermocompression process using a non-conductive film (NCF)
Publication Date: 2024.02.22 SAMSUNG ELECTRONICS CO LTD
  • US20240063167A1 patent drawing
  • US20240063167A1 patent drawing
  • US20240063167A1 patent drawing

AI summary

A semiconductor package includes: a buffer die; a first core die disposed on the buffer die; a second core die disposed on the first core die; a first non-conductive film (NCF) disposed between the first core die and the second core die and bonding the first core die and the second core die to each other; a first molding layer at least partially surrounding a side surface of the first core die; and a second molding layer surrounding the first NCF and the first molding layer, wherein the first core die, the second core die, and the buffer die are disposed on the second molding layer, wherein a side surface of the first molding layer and a side surface of the first NCF form a coplanar surface.