Negative Capacitance FET Header Switches for Low Power

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Solution Overview

Problem

Current semiconductor devices face challenges in minimizing power consumption while maintaining high-speed operations, as existing technologies often require larger chip areas due to additional circuitry for power control, and there is a trade-off between power consumption and chip area, especially with higher threshold voltage devices leading to increased on-resistance.

Innovation Solution

The use of negative capacitance field effect transistors (NC FETs) as header and/or footer switches, which incorporate a ferroelectric capacitor connected in series with the gate of a MOS FET, allowing for voltage amplification and reduced off-leakage current without increasing the threshold voltage of the MOS FET portion, thereby reducing power consumption and chip area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If traditional MOS FETs with higher threshold voltage are used to reduce power consumption, then power consumption decreases, but on-resistance increases

Engineering Contradiction:
Improvepower consumptionVSAvoidon-resistance
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent changes the electrical parameters of the FET by introducing a negative capacitance element that modifies the gate voltage characteristics. This allows the device to operate with effective threshold voltage modulation without permanently increasing the physical threshold voltage, thereby maintaining low on-resistance while achieving power savings through dynamic voltage control

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The negative capacitance element acts as an intermediary between the control voltage and the channel, providing voltage amplification. This mediator enables the system to achieve higher effective gate voltages (and thus lower on-resistance) with smaller control voltages, resolving the trade-off between power consumption and on-resistance

Inventive Principle:
Principle #24Intermediary (Mediator)

2Use of energy by moving object

If additional circuitry for power control is added to minimize power consumption, then power consumption decreases, but chip area increases

Engineering Contradiction:
Improvepower consumptionVSAvoidchip area
Core Design Contradiction:
Use of energy by moving objectVSArea of stationary object

Solution Approach 1:

The patent merges the power control function directly into the FET structure by integrating the negative capacitance element with the gate. This combination eliminates the need for separate power control circuitry, achieving power management without increasing chip area

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The negative capacitance FET structure serves multiple functions simultaneously: it provides the primary switching function, implements power control, and enables voltage amplification. This multi-functionality reduces the need for additional dedicated power control circuitry, thereby minimizing chip area while managing power consumption

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Loss of energy

If threshold voltage of MOS FET is increased to reduce leakage current, then standby leakage current decreases, but on-resistance increases

Engineering Contradiction:
Improvestandby leakage currentVSAvoidon-resistance
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent introduces dynamic voltage control through the negative capacitance element, allowing the effective threshold voltage to be adjusted in real-time. This dynamic adjustment enables the system to maintain high threshold voltage characteristics during standby (reducing leakage) while achieving low on-resistance during active operation through voltage amplification

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The negative capacitance element dynamically changes the electrical parameters of the FET by providing voltage amplification. This allows the system to effectively modulate the threshold voltage without permanently increasing it, thereby reducing standby leakage current while maintaining low on-resistance when needed

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

NC FETs achieve lower standby leakage current, lower on-resistance, and smaller device area compared to traditional MOS FETs, enabling enhanced operational speed and reduced chip area, with a 63% and 55% reduction in device area for LVT and SVT MOS FETs respectively, and a significant decrease in standby leakage current.

Implementation Method 1

a negative capacitor showing a negative capacitance and having a first terminal and a second terminal, and the first terminal is electrically coupled to a gate of the MOS FET

Methodology Applied
Scientific EffectNegative capacitance: Capacitance

Implementation Method 2

the capacitor dielectric layer is a ferroelectric material including one or more selected from the group consisting of ZrO2, ZrAlSiO, HfO2, HfZrO2, HfO2 doped with Zr (HfZrOx), HfO2 doped with Al (HfAlOx), and HfO2 doped with Si (HfSiOx)

Methodology Applied
Scientific EffectFerroelectric effect:

Data Source

PatentUS11114540B2Semiconductor device including standard cells with header/footer switch including negative capacitance
Publication Date: 2021.09.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11114540B2 patent drawing
  • US11114540B2 patent drawing
  • US11114540B2 patent drawing

AI summary

A semiconductor device includes a first potential supply line for supplying a first potential, a second potential supply line for supplying a second potential lower than the first potential, a functional circuit, and at least one of a first switch disposed between the first potential supply line and the functional circuit and a second switch disposed between the second potential supply line and the functional circuit. The first switch and the second switch are negative capacitance FET.