Near-Field Aperture Array for Sub-Wavelength Thermal Imaging
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Solution Overview
Problem
Traditional thermal imaging systems have limited resolution, making it difficult to measure the individual temperatures of small features such as transistors, capacitors, and inductors in semiconductor devices, as the resolution is often limited to the wavelengths of infrared light emitted by these features.
Innovation Solution
A thermographic imaging device with a near-field aperture array (NFAA) and a focal plane detector array, where the NFAA includes a planar arrangement of orifices aligned with infrared sensitive devices, allowing for higher resolution temperature sensing by adjusting the distance and position to increase the detection of infrared photons from small features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional infrared detectors are used, then the system can detect infrared photons from surface features, but the resolution is limited to approximately the infrared wavelengths emitted by the features
Solution Approach 1:
The aperture is divided into multiple discrete openings (e.g., 256 openings in a 16x16 array) instead of a single continuous aperture. Each opening is aligned with a corresponding infrared-sensitive device in the focal array, enabling spatial segmentation of the detected infrared radiation and achieving resolution beyond the diffraction limit of traditional single-aperture systems.
Solution Approach 2:
The system transitions from conventional optical imaging to near-field imaging by placing the aperture array extremely close to the target surface (within fractions of a wavelength distance). This dimensional change in the object-detector spacing enables sub-wavelength resolution by capturing evanescent waves and near-field radiation that carry fine spatial details of small features.
2Quantity of substance
If the aperture size is increased to improve signal detection, then more infrared photons can be detected, but the resolution decreases due to diffraction effects
Solution Approach 1:
The large aperture area is segmented into multiple small openings distributed across the aperture plane. Each opening provides sufficient photon collection while the segmented arrangement prevents diffraction-induced resolution degradation by directing light from distinct spatial locations to corresponding detectors without overlapping diffraction patterns.
Solution Approach 2:
The aperture array serves as an intermediary optical element that couples the near-field radiation from the target surface to the infrared-sensitive detectors. The specific geometry and spacing of the aperture openings mediate the transmission of infrared photons while maintaining spatial information, enabling both high photon detection and high resolution simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-resolution thermography by increasing the detection capability of infrared photons from small features, allowing for precise temperature measurement and imaging of semiconductor devices, overcoming the limitations of traditional systems.
Implementation Method 1
The infrared detectors detect the amount of infrared photons that are emitted by the surface
Implementation Method 2
The focal array 104 includes a planar array of a plurality of electromagnetic (e.g., IR) sensitive pixels that are operative to convert IR photons into electrons
Data Source
AI summary
A thermographic imaging device includes a focal array portion including a planar arrangement of a plurality of light sensitive devices, and an aperture portion including a facing planar surface, an opposing planar surface, and an arrangement of a plurality of orifices that are communicative with the facing planar surface and the opposing planar surface, each infrared sensitive device of the plurality of infrared arranged in alignment with a corresponding orifice of the plurality of orifices.