Needle-Shaped Fluid Ejection Body for High Aspect Ratio 3D Structures
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Solution Overview
Problem
Conventional inkjet methods face challenges in forming ultra-fine three-dimensional structures due to limitations in droplet size, kinetic energy, and material constraints, which hinder accurate landing and stacking of fine droplets, especially for high aspect ratio structures required in nanotechnology and integrated circuits.
Innovation Solution
A method involving the use of a needle-shaped fluid-ejection body with a fine diameter, applying a voltage to generate an electric field that focuses on the substrate, allowing for the accurate landing and stacking of ultra-fine droplets, which are quickly solidified to form three-dimensional structures with high aspect ratios, using materials like metal particulates, polymer solutions, and ceramic sol-gels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the droplet diameter is reduced to achieve ultra-fine structures, then the manufacturing precision is improved, but the kinetic energy decreases making accurate landing difficult
Solution Approach 1:
A charged liquid ejection nozzle serves as an intermediary device that generates and controls charged droplets. The nozzle applies high voltage to liquid, creating charged droplets that are guided by electric fields to achieve accurate landing despite ultra-fine dimensions. This intermediary mechanism enables both small droplet size and sufficient control force.
Solution Approach 2:
The patent replaces conventional mechanical pressure-based ejection with an electrostatic field-based system. High voltage applied to the nozzle creates electric fields that control droplet formation, ejection, and guidance. This substitution allows ultra-fine droplets to be ejected and accurately positioned without relying on mechanical pressure that would compromise droplet integrity.
2Device complexity
If conventional inkjet methods are used to eject ultra-fine droplets, then the device complexity is reduced, but the manufacturing precision deteriorates due to inability to achieve accurate landing
Solution Approach 1:
Electric fields serve as an intermediary control mechanism between the ejection system and the substrate. By charging droplets and applying controlled electric fields during flight, the system achieves precise landing accuracy without requiring complex mechanical positioning systems or feedback mechanisms.
Solution Approach 2:
The patent changes the physical state of droplets by charging them electrically. This parameter change enables the droplets to respond to electric fields during flight, allowing dynamic control of trajectory and landing position. The charged state transforms passive droplets into controllable entities that can be precisely guided.
3Manufacturing precision
If high voltage is applied to achieve accurate droplet positioning, then the manufacturing precision is improved, but the energy consumption increases
Solution Approach 1:
High voltage is applied periodically rather than continuously - specifically during droplet ejection and positioning phases. The voltage is pulsed to coincide with critical moments when droplet control is needed, then reduced or turned off during transport phases. This periodic application maintains positioning accuracy while minimizing overall energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the creation of three-dimensional structures with precise control over cross-sectional diameter and aspect ratio, achieving high accuracy and aspect ratios of 5 or more, overcoming the limitations of conventional inkjet methods by ensuring reliable and accurate droplet landing and growth of structures with high aspect ratios.
Implementation Method 1
applying a voltage to the vicinity of a fluid-ejecting body having an ultra-fine diameter
Implementation Method 2
applying a voltage having a prescribed waveform to the needle-shaped fluid-ejection body, making the droplet fly and land on the substrate
Implementation Method 3
solidifying the droplet after the fluid droplet is landed on the substrate
Data Source
AI summary
A method of producing a three-dimensional structure contains the steps of: arranging a substrate close to a tip of a needle-shaped fluid-ejection body having a fine diameter supplied with a solution, ejecting a fluid droplet having an ultra-fine diameter toward a surface of the substrate by applying a voltage having a prescribed waveform to the needle-shaped fluid-ejection body, making the droplet fly and land on the substrate, and solidifying the droplet after the fluid droplet is landed on the substrate; further a three-dimensional structure has a fine diameter comprises droplets having an ultra-fine particle diameter, wherein the structure is grown by solidifying the droplets and stacking the solidified droplets.