Needle Head With Integrated Medium Outlets for Sensor Calibration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing sensor calibration methods for semiconductor chips are inefficient due to the inability to directly expose the measurement area to calibration gas, leading to inaccurate calibration and testing results.
Innovation Solution
A needle head with outlets on its lower surface is designed to supply a medium directly to the electronic components, allowing for improved exposure and calibration of sensors during the calibration process, which can be integrated into a probe arrangement with a panel to expose a larger area of the wafer to the test environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the probe head is fixed in the middle of the lid with an opening, then the needle electrodes can contact the electronic components, but calibration gas cannot be supplied directly to the measurement area
Solution Approach 1:
The patent combines the needle electrode holder and the medium supply function into a single integrated needle head structure. The body of the needle head contains a channel system with inlet and outlets, merging the electrical contact function (via needle electrodes) and the medium delivery function (via channels and outlets) into one component, enabling both functions to operate simultaneously without requiring separate structures
Solution Approach 2:
The needle head serves multiple functions: it holds and positions the needle electrodes for electrical contact, provides a sealed chamber for the medium, and delivers the calibration gas or liquid directly to the electronic component through outlets on its lower surface. This multi-functional design eliminates the need for separate probe and medium delivery systems
2Reliability
If calibration gas is supplied through the lid, then the gas can reach the wafer periphery, but the measurement area under the probe head cannot be directly exposed to calibration gas
Solution Approach 1:
The needle head acts as an intermediary device that receives calibration gas from the lid's feed duct and redirects it through its internal channel system to deliver the gas directly to the measurement area. The channel system within the needle head body serves as a mediator to transport the medium from the lid to the electronic component location, ensuring controlled delivery to the precise measurement zone
3Ease of manufacture
If the needle head structure is simplified without outlets, then the structure is easier to manufacture, but the ability to directly expose electronic components to test environment is lost
Solution Approach 1:
The needle head body incorporates a channel system with outlets that can be integrated into the manufacturing process. The channels provide controlled pathways for medium delivery, and the outlets on the lower surface enable direct exposure of the electronic component to the test environment while maintaining a relatively simple monolithic structure that can be manufactured using standard techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables more accurate calibration and testing results by ensuring that electronic components, such as sensors, are directly exposed to a well-defined test environment, improving the reliability and accuracy of measurements and substantially reducing the time required for the production process.
Implementation Method 1
A channel between an inlet in the body and the outlets is provided for conveying a medium from the inlet to the outlets
Data Source
AI summary
The present idea refers to a needle head, its use in a probe arrangement, and a method for electrically contacting multiple electronic components. The needle head comprises a body with a lower surface, needle electrodes emerging from the lower surface, and multiple outlets arranged in the lower surface. A channel is arranged between an inlet in the body and the outlets for conveying a medium from the inlet to the outlets. By this means, electronic components arranged in close distance under the lower surface of the needle head are directly exposed to the medium which provides a test environment during a test of the electronic components.