Needle Movement Control in Charged Particle Beam Apparatus
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Solution Overview
Problem
In charged particle beam apparatuses, there is a risk of the needle colliding with other components during automatic movement, as existing systems lack precise control over the needle's movement route, leading to potential contact and safety issues.
Innovation Solution
A charged particle beam apparatus with a controller that acts as a needle actuator to move the needle along a preset target position and way points, ensuring safe and controlled movement by setting the actuating direction for each way point, thereby preventing collisions with other components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the needle is automatically moved to a preset position or predetermined position, then the operation efficiency is improved, but the risk of collision with other components increases
Solution Approach 1:
The controller预先 sets multiple way points along the movement route before the needle moves. By pre-planning the path with intermediate way points, the system can anticipate potential collision risks and adjust the movement accordingly, rather than reacting after a collision occurs. This preliminary path planning enables automatic movement while maintaining safety.
Solution Approach 2:
The movement route is segmented into multiple sections defined by way points between the current position and the preset target position. Instead of moving directly to the final destination, the needle stops at intermediate way points, allowing the controller to check for obstacles and adjust the path. This segmentation transforms a single high-risk movement into multiple controlled steps.
2Speed
If the needle is moved linearly from current position to preset position, then the movement speed is improved, but the collision risk with components on the movement route increases
Solution Approach 1:
The direct linear path is segmented into multiple sub-paths by introducing way points. The needle moves from current position to first way point, then to second way point, and finally to the preset position. Each segment is shorter and can be controlled independently, reducing the probability of collision in any single segment while maintaining overall movement efficiency.
Solution Approach 2:
The controller monitors the needle's position and the environment at each way point, providing feedback to adjust subsequent movement. If an obstacle is detected at or near a way point, the controller can modify the remaining path or slow down the needle, creating a feedback loop that balances speed with collision avoidance.
Data Source
AI summary
A charged particle beam apparatus includes: a charged particle beam column configured to irradiate an irradiation target with a charged particle beam; a detector configured to detect secondary charged particles emitted from the irradiation target by the irradiation of the charged particle beam; a needle arranged in an irradiation area of the charged particle beam; a needle actuator configured to actuate the needle; and a controller configured to control the needle actuator to actuate the needle along a movement route that is configured by a preset target position and preset way points. The controller controls the needle actuator to set an actuating direction of the needle for each of the way points.