Needle Probe Tracking Target Position Changes in Charged Particle Beam Apparatus

The patent combines multiple waypoint designations into a single continuous operation. The needle probe moves sequentially through multiple waypoints without requiring the operator to designate start and end points for each individual waypoint, merging what would otherwise be multiple separate operations into one unified process.

The patent implements dynamic waypoint designation where the target position is automatically updated as the needle moves. Instead of static pre-defined waypoints requiring multiple designations, the system dynamically adjusts the target position based on the needle's current movement state, allowing continuous smooth motion through multiple points.

The patent implements a feedback mechanism where the controller continuously monitors the needle's position and automatically updates the target position based on the needle's movement state. This feedback loop allows the needle to track target position changes smoothly without requiring complex manual intervention for each waypoint transition.

The system performs self-service by automatically updating the target position and controlling the needle's movement without requiring the operator to manually designate each waypoint. The controller autonomously manages the sequential movement through multiple positions, reducing the burden on the operator while maintaining smooth continuous motion.