NEG-Coated Turbomolecular Pump Components for Ultra-High Vacuum
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Solution Overview
Problem
Existing vacuum devices, particularly turbomolecular vacuum pumps, face challenges in maintaining ultra-high vacuum environments due to outgassing and gas particle contamination, necessitating improved gas-absorbing coatings and manufacturing methods.
Innovation Solution
Applying a non-evaporable getter (NEG) coating, primarily composed of titanium, zirconium, and vanadium, to specific components of the turbomolecular pump, utilizing magnetron sputtering with relative movement between the target and component to enhance coating efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If NEG coating is applied to reduce outgassing and absorb gas particles, then vacuum performance is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent applies magnetron sputtering parameters (power, pressure, time) to optimize NEG coating deposition, achieving uniform coverage on complex pump geometries while controlling manufacturing complexity through parameter optimization rather than process redesign
Solution Approach 2:
The patent replaces traditional mechanical wire-based coating methods with magnetron sputtering, a physical vapor deposition process that uses magnetic fields and plasma to deposit NEG material, thereby improving coating quality and reducing mechanical complexity of the coating application system
2Ease of manufacture
If wire coating method is used to produce NEG coatings, then manufacturing cost is reduced, but coating quality and uniformity deteriorate
Solution Approach 1:
The patent replaces mechanical wire coating with magnetron sputtering, using electromagnetic fields to generate plasma that deposits NEG material uniformly across complex surfaces, achieving superior coating quality through physical rather than mechanical deposition
Solution Approach 2:
The patent optimizes sputtering parameters including RF power (100-500W), pressure (5-50 mTorr), and deposition time to control coating thickness and uniformity, demonstrating that parameter control can achieve precision without increasing manufacturing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The NEG coating reduces outgassing, actively absorbs gas particles, and achieves ultra-high vacuum conditions with reduced manufacturing time and cost, maintaining vacuum integrity and performance.
Implementation Method 1
in an activated state, the coating material can provide a pumping effect through gas absorption
Implementation Method 2
the NEG coating of a turbomolecular pump is carried out by a sputtering process, in particular by magnetron sputtering
Data Source
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AI summary
The invention relates to a vacuum device, in particular a vacuum pump, sensor, measuring device, or valve, comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and which is coated at least in part by a layer which absorbs gas particles, in particular with a layer of a non-evaporable getter (NEG) material. The invention further relates to a method for operating a vacuum device and for coating the component of the vacuum device or of a component of a vacuum system.