Neighboring Die Seal Ring Interconnect for Lower-Resistance Packaging

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Solution Overview

Problem

In three-dimensional semiconductor packages, the long distance between stacked dies increases circuit resistance due to the need for signals to travel through the first die, leading to inefficiencies in electrical connections and potential contamination risks.

Innovation Solution

The implementation of a semiconductor package with a modified seal ring structure that includes a second seal ring and a third seal ring, each with a circuit seal, allowing for a direct lateral electrical connection between the second and third dies without using through-silicon vias, thereby reducing resistance and protecting against contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If signals travel through the first die to connect stacked dies, then electrical connection is established, but circuit resistance increases

Engineering Contradiction:
Improveelectrical connection qualityVSAvoidcircuit resistance
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent transitions from vertical signal routing (through the first die) to lateral signal routing (through the seal ring structure). By changing the dimension of the connection path from vertical to horizontal, the signal bypasses the high-resistance path through the first die and achieves lower resistance through the seal ring's conductive structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The seal ring structure acts as an intermediary element that enables direct lateral electrical connection between the second and third dies. Instead of forcing signals through the first die, the seal ring serves as a mediating conductive path that reduces resistance while maintaining electrical connectivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If through-silicon via structures are used for die connection, then electrical connection is achieved, but contamination risk increases

Engineering Contradiction:
Improveelectrical connectionVSAvoidcontamination risk
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the electrical connection function from the through-silicon via structure and relocates it to the seal ring structure. By removing the connection path from the vertical via structure, the design eliminates the contamination-prone interfaces associated with through-silicon vias while maintaining electrical connectivity through the lateral seal ring path.

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentUS12068262B2Semiconductor package including neighboring die contact and seal ring structures, and methods for forming the same
Publication Date: 2024.08.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12068262B2 patent drawing
  • US12068262B2 patent drawing
  • US12068262B2 patent drawing

AI summary

A semiconductor package includes: a first die; a second die stacked on an upper surface of the first die, the second die including a second semiconductor substrate and a second seal ring structure that extends along a perimeter of the second semiconductor substrate; a third die stacked on the upper surface of the first die, the third die including a third semiconductor substrate and a third seal ring structure that extends along a perimeter of the third semiconductor substrate; and a connection circuit that extends through the second seal ring structure and the third seal ring structure, in a lateral direction perpendicular to the stacking direction of the first die and the second die, to electrically connect the second semiconductor substrate and the third semiconductor substrate.