N/MEMS Resonator Array Filter Without Mechanical Coupling
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Solution Overview
Problem
Existing resonant filters, particularly in telecommunications, face challenges with bulkiness, manufacturing complexity, parameter dispersion, and environmental sensitivity, leading to poor performance in filtering, gain, selectivity, and bandwidth due to mechanical coupling of MEMS resonators.
Innovation Solution
A resonant filter design featuring a matrix of N/MEMS resonators with similar dimensions distributed over multiple lines and columns, where actuation and detection means allow for electrical signal processing without mechanical coupling, leveraging dispersion for precise frequency control and reduced size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If mechanically coupled MEMS resonators are used to implement signal processing functions, then filtering performance and bandwidth are improved, but device size and manufacturing complexity increase
Solution Approach 1:
The patent replaces mechanical coupling between resonators with electrical coupling through a shared bus. Instead of physically connecting resonators through mechanical structures, the invention uses electrical signals to couple the resonators, thereby reducing mechanical complexity and device size while maintaining filtering performance.
Solution Approach 2:
The patent merges multiple resonators into a single integrated structure with a common bus that serves all resonators. This consolidation reduces the overall device size compared to separate mechanically coupled resonators, while the electrical coupling maintains the necessary signal processing functionality.
2Reliability
If mechanically coupled MEMS resonators are used to obtain high resonance frequencies and quality factors, then filtering performance is improved, but manufacturing difficulty increases due to support membranes
Solution Approach 1:
The patent eliminates the need for complex support membranes by replacing mechanical coupling with electrical coupling. The resonators are suspended over a common bus structure but coupled electrically rather than mechanically, simplifying the manufacturing process while maintaining high quality factors.
3Volume of moving object
If NEMS resonators are used to reduce filter size, then device dimensions are reduced, but parameter dispersion and modeling complexity increase
Solution Approach 1:
The patent incorporates feedback mechanisms through the electrical coupling bus that allow for real-time adjustment and compensation of parameter variations. This feedback system helps mitigate the effects of manufacturing dispersion by dynamically optimizing the performance of individual resonators within the array.
4Adaptability or versatility
If a large number of coupled resonators are used to achieve sophisticated filtering functions, then filtering capability is improved, but manufacturing precision and parameter control deteriorate
Solution Approach 1:
The patent segments the filtering function across multiple independently controllable resonators that are electrically coupled. Each resonator can be individually optimized and controlled, allowing sophisticated filtering functions to be achieved while maintaining precise parameter control through independent adjustment of each segment.
Solution Approach 2:
The patent introduces dynamic control capabilities where the electrical coupling allows for real-time adjustment of resonator parameters and coupling strengths. This dynamic adaptability enables precise parameter control even when manufacturing variations exist, as the system can be tuned after fabrication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high-performance filtering with improved gain, selectivity, and bandwidth while reducing bulkiness and manufacturing complexity, achieving precise frequency control and robustness against environmental variations.
Implementation Method 1
actuation means able to excite the resonator by controlling an electrical input signal of the filter
Implementation Method 2
means for detecting the displacements of the resonator capable of delivering an electrical output signal whose value is a function of the detected displacements
Implementation Method 3
resonant filter comprising at least one matrix of n × m resonators of the N/MEMS type
Data Source
Figure 1~2
Figure 3~5
Figure 6~7
AI summary
Resonant filter (10) comprising a matrix (100) of n × m resonators of the N/MEMS type, each resonator comprising actuation means and detection means. An input (12) of the filter, intended to receive an electrical input signal, is electrically connected to the resonator actuation means. The outputs of the resonator detection means are electrically connected together and to an output (14) of the filter, such that the signal intended to be obtained as output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.