Nested Coil Pipe Layout for Stable Substrate Fluid Processing
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Solution Overview
Problem
The use of coil pipes in substrate processing apparatuses with vertical movement leads to increased space occupancy and potential deformation or damage, and causes abrupt changes in temperature or pressure during fluid supply and discharge.
Innovation Solution
The substrate processing apparatus incorporates extendable and contractible coil pipes, with one coil pipe surrounding the other, to reduce space occupancy and maintain consistent fluid temperature and pressure during vertical movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If coil pipes are used to allow flexibility with vertical movement of the second body, then the pipes can accommodate movement without deformation or damage, but the area occupied by the coil pipes increases
Solution Approach 1:
The discharge pipe is disposed to pass through the interior space of the supply pipe, and the supply pipe is disposed to surround the discharge pipe when viewed from above. This nesting arrangement allows both pipes to coexist in a compact configuration, reducing the overall space occupied while maintaining the flexibility needed for vertical movement of the second body.
2Adaptability or versatility
If coil pipes are used to accommodate vertical movement, then flexibility is provided, but abrupt changes in temperature or pressure of the processing fluid occur
Solution Approach 1:
A heat insulating layer is formed between the supply pipe and the discharge pipe. This heat insulating layer acts as an intermediary that prevents heat transfer between the two pipes, thereby maintaining stable temperature and pressure of the processing fluid while still allowing the coil pipes to flex during vertical movement of the second body.
Data Source
AI summary
The present disclosure provides a substrate processing apparatus. The substrate processing apparatus includes: a housing having a first body and a second body providing a processing space therein for processing substrates by being combined with each other; an actuator sealing or opening the processing space by moving the second body in a vertical direction with respect to the first body; a supply pipe supplying fluid to the processing space; and a discharge pipe discharging fluid from the processing space, the supply pipe includes: a first upstream pipe connected to a fluid supply source; a first downstream pipe connected to the second body; and a first coil pipe connected to the first upstream pipe and the first downstream pipe and being extendable and contractible in the vertical direction, and the discharge pipe includes: a second upstream pipe connected to the second body; a second downstream pipe disposed downstream of the second upstream pipe; and a second coil pipe connected to the second upstream pipe and the second downstream pipe and being extendable and contractible in the vertical direction, and any one coil pipe of the first coil pipe and the second coil pipe is disposed to surround the other coil pipe when viewed from above.