Nested-Core Vaporizer for Complete TEOS Precursor Evaporation
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Solution Overview
Problem
Existing TEOS precursor delivery systems require expensive and risky methods for complete atomization and vaporization, which are inefficient and difficult to purge.
Innovation Solution
A liquid precursor vaporizer with nested vaporizer cores and tortuous paths, manufactured via additive manufacturing using Inconel 718, and embedded heaters, which facilitates efficient vaporization and minimizes residual liquid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If expensive and risky methods are used to achieve complete atomization and vaporization, then vaporization completeness is improved, but cost and safety deteriorate
Solution Approach 1:
The vaporizer employs nested vaporizer cores where smaller cores are positioned within larger ones, creating multiple concentric heating zones. This nested configuration allows efficient heat distribution and complete vaporization without requiring expensive external heating systems or complex multi-stage processes, thereby achieving reliable vaporization at lower cost.
Solution Approach 2:
The vaporizer core is divided into multiple segmented heating zones with different thermal characteristics. Each segment handles a portion of the vaporization process, ensuring complete atomization through distributed heating rather than relying on a single high-cost heating method. This segmentation enables cost-effective achievement of complete vaporization.
2Productivity
If complex vaporization methods are used, then vaporization efficiency is improved, but system complexity and difficulty to purge increase
Solution Approach 1:
The nested core design integrates multiple heating functions within a single compact structure, improving vaporization efficiency without increasing overall system complexity. The concentric arrangement allows straightforward installation and simplifies purging compared to multi-component systems, as the nested geometry provides clear flow paths.
Solution Approach 2:
The vaporizer employs curved and spherical geometric features in the core design that enhance heat distribution and fluid flow patterns, improving vaporization efficiency. These curved geometries also facilitate easier purging by eliminating dead zones and providing smooth flow transitions, reducing system complexity despite enhanced performance.
3Manufacturing precision
If additive manufacturing with Inconel 718 is used, then manufacturing precision and heat resistance are improved, but manufacturing cost increases
Solution Approach 1:
The invention specifies Inconel 718 as the additive manufacturing material, which offers superior heat resistance and mechanical properties at elevated temperatures. This material selection enables precise fabrication of complex nested core geometries that maintain dimensional stability under thermal stress, achieving high manufacturing precision for the vaporization components.
Solution Approach 2:
The use of Inconel 718, a nickel-chromium-superalloy composite material, provides enhanced thermal and mechanical properties necessary for high-precision vaporizer cores. This composite material approach allows the additive manufacturing process to achieve complex precise geometries with improved heat resistance, balancing manufacturing cost against performance requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The vaporizer achieves efficient vaporization of TEOS precursor with minimal residual liquid, improving process efficiency and reducing costs by using cost-effective materials and design.
Implementation Method 1
Some examples further comprise a heater. Some examples further comprise at least one heater disposed between the first and second vaporizer cores.
Implementation Method 2
a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer
Data Source
AI summary
In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer.