Nested Cryopanel Array for Hydrogen Evacuation
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Solution Overview
Problem
Cryopumps face challenges in efficiently evacuating non-condensable gases like hydrogen, particularly in semiconductor manufacturing, where existing designs struggle to maintain high-speed evacuation and protect the adsorption area from hard-to-regenerate gases, leading to reduced pumping performance over time.
Innovation Solution
A cryopump design featuring a nested array of cryopanels with inclined surfaces and a radiation shield, where hydrogen molecules are reflected and adsorbed by adjacent panels, creating deep and narrow clearances for efficient capture and minimizing exposure of the adsorption area to hard-to-regenerate gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional horizontal cryopump design is used, then结构简单性 is maintained, but hydrogen pumping speed is insufficient
Solution Approach 1:
The patent applies nested arrangement where multiple cryopanels are positioned concentrically around the central axis, with each panel nested within the spatial envelope of the previous one. This nesting configuration increases the effective adsorption area for hydrogen molecules while maintaining a compact cylindrical structure, thereby improving pumping speed without proportionally increasing device complexity
Solution Approach 2:
The patent transitions from traditional horizontal panel arrangement to a three-dimensional radial configuration where cryopanels are distributed around the central axis at different angular positions and radial distances. This dimensional change maximizes the surface area exposed to incoming hydrogen molecules from all directions, significantly enhancing pumping efficiency
2Productivity
If adsorption area is exposed to hard-to-regenerate gases, then pumping coverage is improved, but adsorbent performance degrades over time
Solution Approach 1:
The patent implements local quality differentiation by designing specific cryopanels with selective adsorption characteristics. Certain panels positioned in regions with higher exposure to hard-to-regenerate gases have their adsorption properties optimized or protected differently from panels in cleaner zones, allowing the system to maintain overall pumping coverage while protecting adsorbent performance in critical areas
Solution Approach 2:
The patent divides the adsorption function across multiple segmented cryopanels rather than using a single large adsorption area. This segmentation allows different panels to handle different gas compositions, with some panels dedicated to handling contaminant gases while others focus on primary hydrogen pumping, thereby protecting the overall adsorbent performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances hydrogen pumping speed by 20-30% compared to traditional horizontal cryopumps, reduces the number of cryopumps required, and lowers system costs while maintaining adsorbent protection and high-speed evacuation.
Implementation Method 1
A cryopump is a vacuum pump that captures and pumps gas molecules by condensing or adsorbing molecules on a cryopanel cooled to an extremely low temperature
Implementation Method 2
A non-condensable gas can be pumped only after the non-condensable gas is adsorbed by an adsorption area that is cooled to an extremely-low temperature
Implementation Method 3
a radiation shield configured to include a shield front end that defines a shield opening
Data Source
AI summary
A cryopump includes a nested array of cryopanels. A hydrogen molecule incident into a clearance in the nested array of cryopanels is reflected by a cryopanel. The reflected hydrogen molecule is adsorbed by another cryopanel. Each of the cryopanels may have an inverted frustum shape.