Nested Processing Cups for Substrate Process-Stream Separation

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in efficiently managing and separating different processing liquids and gases, particularly in ensuring effective separation and recovery of acidic, organic, and alkaline liquids and gases during substrate processing.

Innovation Solution

The apparatus incorporates a substrate holding unit, processing liquid supply units, guide cups, and exhaust ports to manage and separate processing liquids and gases, utilizing a suction port and exhaust switching unit to control the flow and exhaust of different processing liquids and gases, with a control device to coordinate the processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple processing cups are used to separate and recover different processing liquids, then the separation and recovery efficiency of processing liquids is improved, but the device complexity increases

Engineering Contradiction:

Improveseparation and recovery efficiency of processing liquidsVSAvoidstructure complexity of processing cups and exhaust ports

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The processing system is divided into multiple independent processing cups (first processing cup, second processing cup, third processing cup) that can separately handle different processing liquids. Each cup has its own exhaust port and drainage system, enabling independent separation and recovery of different liquids without cross-contamination.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The processing cups are arranged in a nested configuration where the second processing cup is positioned inside the first processing cup, and the third processing cup is positioned inside the second processing cup. This nested structure allows multiple separation functions to be integrated into a compact space while maintaining independent operation of each cup.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Productivity

If multiple exhaust ports are provided for different gases, then the exhaust efficiency and separation of gases is improved, but the device complexity increases

Engineering Contradiction:

Improveexhaust efficiency and gas separationVSAvoidnumber of exhaust ports and control mechanisms

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

Multiple exhaust ports are provided at different locations (first exhaust port, second exhaust port, third exhaust port) corresponding to different processing cups. Each exhaust port is dedicated to exhausting gases from its associated processing cup, enabling simultaneous and independent exhaust operation for different gas types without interference.

Inventive Principle:

Principle #1Segmentation

3Manufacturing precision

If processing liquids are not properly separated, then cross-contamination occurs and processing quality deteriorates, but implementing separation systems increases device complexity

Engineering Contradiction:

Improveprocessing quality and contamination controlVSAvoidseparation system structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system uses separate processing cups for different processing liquids, with each cup having its own drainage path and exhaust port. This segmentation prevents cross-contamination between different processing liquids and gases by creating physically isolated channels for each substance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A suction port is provided to suction gas from the processing cup interior. The suction port acts as an intermediary mechanism to remove gases from the processing environment without requiring direct contact between different processing liquids, thereby preventing cross-contamination while maintaining processing quality.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables efficient separation and recovery of processing liquids and gases, reducing cross-contamination and improving the processing efficiency by controlling the flow and exhaust of each liquid and gas type, enhancing the overall processing quality.

Implementation Method 1

a suction port that is provided between the drain port and the first exhaust port in a height direction thereof

Methodology Applied

Scientific EffectSuction: Suction

Data Source

PatentUS12459009B2Substrate processing apparatus and substrate processing method

Publication Date: 2025.11.04 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus includes a substrate holding unit that holds a substrate horizontally, a processing liquid supply unit that supplies a processing liquid to the substrate, a first processing cup that is provided annularly around the substrate holding unit, a second processing cup that is provided annularly around the substrate holding unit and on an inner side of the first processing cup, a drain port that is formed on a storage unit, a first exhaust port that is provided to exhaust a gas between the first processing cup and the second processing cup, a second exhaust port that is provided on an inner side of the first exhaust port to exhaust a gas on an inner side of the second processing cup, and a suction port that is provided between the drain port and the first exhaust port in a height direction thereof.