Nested Laminated Structure for Biaxial Sensor Movement
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Solution Overview
Problem
Existing laminated structures cannot realize a biaxial angular velocity sensor or triaxial acceleration sensor that requires both a portion moving perpendicular to the substrate surface and a portion moving parallel to the substrate surface, limiting sensor size reduction and increasing manufacturing costs.
Innovation Solution
A laminated structure with a nested design, featuring an outer movable portion and an inner movable portion, where the inner portion is housed within the outer portion, and supported by anisotropic springs that allow displacement in both perpendicular and parallel directions to the substrate surface, enabling the realization of sensors with reduced size and increased manufacturing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a laminated structure is used to support movable portions, then sensor size can be reduced and manufacturing efficiency increased, but it becomes impossible to realize sensors requiring both perpendicular and parallel movement capabilities
Solution Approach 1:
The patent introduces a vertical dimension (thickness direction of substrate) as a new degree of freedom for movable portion displacement. By forming the first movable portion that can move in the thickness direction and the second movable portion that can move in the plane of the substrate, the system achieves three-dimensional movement capability within a compact laminated structure, resolving the contradiction between miniaturization and movement versatility.
Solution Approach 2:
The patent embeds the first movable portion (for perpendicular movement) and the second movable portion (for parallel movement) within the same laminated substrate structure. The movable portions are formed in different layers at different heights, with some springs overpassing across movable portions, creating a nested arrangement that enables multiple movement capabilities in a compact volume.
2Reliability
If separate structures are used for perpendicular and parallel movement support, then each movement direction can be optimized, but manufacturing complexity and cost increase
Solution Approach 1:
The patent merges the support structures for perpendicular and parallel movement into a single integrated laminated substrate. Multiple springs (first springs for perpendicular movement, second springs for parallel movement) and movable portions are formed within the same substrate using semiconductor manufacturing processes, eliminating the need for separate structures and reducing overall system complexity.
Solution Approach 2:
The laminated substrate serves multiple functions simultaneously: it provides mechanical support for both types of movable portions, enables perpendicular movement through first springs, enables parallel movement through second springs, and facilitates manufacturing through standardized semiconductor processing techniques. This multi-functional design reduces device complexity while maintaining performance.
3Productivity
If multiple movable portions are integrated in a laminated structure, then manufacturing efficiency increases, but the structure becomes more complex
Solution Approach 1:
The patent utilizes changes in material properties and structural parameters during the manufacturing process. By forming movable portions and springs with specific geometric parameters (thickness, width, height) and material properties (elastic modulus, density) that differ between layers, the system achieves complex functionality while maintaining compatibility with standardized manufacturing processes, thereby improving productivity.
Solution Approach 2:
The patent segments the movable structure into distinct first and second movable portions located at different heights and layers. Each segment has specialized springs (first springs for vertical movement, second springs for horizontal movement) and can be manufactured independently using sequential processing steps, which simplifies the overall manufacturing complexity while enabling multiple functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the realization of biaxial angular velocity sensors and triaxial acceleration sensors, reducing sensor size and manufacturing costs while increasing the number of structures that can be produced from a single substrate.
Implementation Method 1
A y spring, which is flexible in a y-axis direction and rigid in x-axis and z-axis directions, connects the outer movable portion and the substrate. A z spring, which is flexible in a z-axis direction and rigid in x-axis and y-axis directions, connects the inner movable portion and the substrate.
Implementation Method 2
A method is known that utilizes a phenomenon in which Coriolis force is generated in a third axial direction when a moving body oscillating in a first axial direction rotates about a second axis to measure angular velocity about the second axis from a displacement in the third axial direction
Data Source
AI summary
A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.