Nested-Membrane Sensor Die for Absolute and Differential Pressure
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Solution Overview
Problem
Existing pressure sensors require separate components for measuring absolute and differential pressures, increasing component count, size, and manufacturing costs, limiting their application in certain scenarios.
Innovation Solution
A sensor die with a diaphragm featuring a first membrane for differential pressure measurement and a second membrane within the first membrane for absolute pressure measurement, integrated into a single diaphragm, utilizing piezoresistive elements to detect both pressures simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate sensor diaphragms are used to measure absolute and differential pressure, then measurement capability is improved, but component count and device size increase
Solution Approach 1:
The patent combines two separate sensor diaphragms into a single integrated diaphragm structure. The first diaphragm measures differential pressure while the second diaphragm measures absolute pressure, both within one unified component. This merging eliminates the need for separate components while maintaining dual measurement capability, directly resolving the contradiction between measurement versatility and device complexity.
Solution Approach 2:
The integrated diaphragm structure serves multiple functions simultaneously - it acts as both a differential pressure sensor and an absolute pressure sensor. The first diaphragm responds to pressure differences across it, while the second diaphragm responds to absolute pressure, making the single component universal for both measurement types and eliminating the need for separate specialized components.
2Adaptability or versatility
If separate sensor diaphragms are used to measure absolute and differential pressure, then measurement capability is improved, but device size increases
Solution Approach 1:
By merging two separate diaphragm-based pressure sensors into one integrated diaphragm structure, the patent significantly reduces the overall device footprint. The first and second diaphragms are positioned within the same structural envelope, allowing dual pressure measurement capability in a compact form factor suitable for space-constrained applications.
Solution Approach 2:
The patent employs a nested configuration where the second diaphragm is positioned within or alongside the first diaphragm structure. This nesting arrangement allows both measurement functions to coexist in a compact space, with the second diaphragm utilizing the same structural footprint as the first, thereby minimizing the overall device area while maintaining dual measurement capability.
3Adaptability or versatility
If separate sensor diaphragms are used to measure absolute and differential pressure, then measurement capability is improved, but manufacturing cost increases
Solution Approach 1:
The integration of two pressure measurement functions into a single diaphragm structure simplifies the manufacturing process. Instead of producing, testing, and assembling two separate diaphragm components, the patent enables fabrication of one unified structure with both measurement capabilities, reducing material waste, assembly steps, and quality control complexity, thereby lowering overall manufacturing costs.
Solution Approach 2:
The universal diaphragm structure serves dual measurement purposes, eliminating the need for separate manufacturing lines or component inventories for absolute and differential pressure sensors. This multi-functionality streamles procurement, inventory management, and assembly operations, resulting in reduced manufacturing costs compared to maintaining separate component systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces component count and size, allowing for lower manufacturing costs and improved flexibility in small applications while maintaining high accuracy of pressure measurements through compensation algorithms.
Implementation Method 1
The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side
Implementation Method 2
The second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm
Data Source
AI summary
A sensor die includes a diaphragm having a first membrane and a second membrane positioned within the first membrane. The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side. The second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm.