Nested Pod Reticle Container with Angled Clamping
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Solution Overview
Problem
Existing reticle containers are unable to securely store and handle large-format reticles due to their larger sizes and different aspect ratios, which do not fit current pod designs and related automation systems.
Innovation Solution
The development of substrate containers with inner and outer pods that utilize angled flanges, clamping mechanisms, and actuation features to securely hold large-format reticles, allowing for horizontal or vertical opening and closure, and incorporating reticle retention features to ensure secure clamping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional reticle pods with vertical opening are used, then the pod structure is simple and easy to manufacture, but large-format reticles cannot be securely stored and handled due to size and aspect ratio constraints
Solution Approach 1:
The patent employs a nested pod structure where an inner pod containing the reticle is placed within an outer pod. The inner pod has a first opening that can be opened independently, while the outer pod provides additional support and retention features. This nested configuration allows the system to accommodate large-format reticles while maintaining a manageable overall structure that interfaces with standard automation equipment.
Solution Approach 2:
The pod system is divided into separate functional components: an inner pod for direct reticle containment with its own opening mechanism, and an outer pod providing structural support and additional retention features. This segmentation allows each component to be optimized for its specific function while working together to solve the large-format reticle storage problem.
2Adaptability or versatility
If the outer pod opens horizontally to accommodate large-format reticles, then large-format reticles can be stored, but the clamping and retention mechanisms become more complex
Solution Approach 1:
The pod system incorporates self-aligning and self-retaining features where the geometry of the inner and outer pods work together to automatically position and secure the reticle. The first opening of the inner pod and the retention features of the outer pod are designed to engage with each other in a predetermined manner, reducing the need for complex active clamping mechanisms while still providing secure retention.
Solution Approach 2:
The pod structure employs asymmetric opening directions: the inner pod opens in a first direction while the outer pod opens in a second direction different from the first. This asymmetric design allows optimization of each pod's opening mechanism for its specific function, with the inner pod providing easy access and the outer pod providing stable retention, thereby managing complexity through functional differentiation.
3Extent of automation
If standard mechanical interface (SMIF) pods are used, then automation compatibility is achieved, but the pods cannot securely contain large-format reticles with different aspect ratios
Solution Approach 1:
The nested pod system maintains compatibility with standard SMIF automation interfaces through the outer pod's external dimensions and interface features, while the inner pod provides the adapted internal configuration needed for large-format reticles. This multi-functional design allows the same outer pod structure to interface with existing automation equipment while the inner pod adapts to accommodate various large-format reticle sizes and aspect ratios.
Solution Approach 2:
By nesting an adaptable inner pod within a standardized outer pod, the system achieves both automation compatibility (through the outer pod's standard interface) and adaptability to large-format reticles (through the inner pod's configurable space and opening mechanism). The nested structure allows the standardized external interface to coexist with the customized internal configuration.
Data Source
AI summary
A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.