Nested Processing Cup Layout for Clean Substrate Liquid Separation
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently managing and separating different processing liquids and gases, leading to inefficiencies and potential cross-contamination during substrate processing.
Innovation Solution
A substrate processing apparatus with a configuration that includes multiple processing cups, exhaust ports, and a suction port system, allowing for the separation and management of different processing liquids and gases through controlled flow and exhaust pathways, ensuring minimal cross-contamination and efficient processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple processing cups are used to separate and recover different processing liquids, then processing efficiency and liquid management are improved, but device complexity increases
Solution Approach 1:
The patent implements nested processing cups where a second processing cup is placed inside a first processing cup, and a third processing cup is placed inside the second processing cup. This nested arrangement allows multiple processing liquids to be separated and managed simultaneously within a compact structure, improving processing efficiency while controlling device complexity through spatial organization.
Solution Approach 2:
The patent divides the processing system into multiple separate processing cups, each dedicated to a specific processing liquid. Each cup has its own exhaust port and drainage system, enabling independent management of different processing liquids and gases, thereby improving productivity through specialized processing while maintaining clear functional separation.
2Productivity
If multiple exhaust ports are provided for different processing cups, then gas exhaust efficiency is improved, but device complexity increases
Solution Approach 1:
The patent provides separate exhaust ports for each processing cup (first exhaust port for the first processing cup, second exhaust port for the second processing cup, third exhaust port for the third processing cup). This segmentation allows independent exhaust management for each processing stage, improving gas exhaust efficiency by enabling simultaneous exhaust operations while maintaining clear functional separation through dedicated exhaust pathways.
3Reliability
If a suction port is added to manage gases between processing cups, then cross-contamination is reduced, but device complexity increases
Solution Approach 1:
The suction port acts as an intermediary mechanism to remove gases from the spaces between processing cups before they can cause cross-contamination. By providing a dedicated suction pathway that draws gases from the first processing cup space, second processing cup space, and third processing cup space separately, the system prevents harmful gas migration while maintaining a relatively simple structure through direct suction connections.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively separates and manages various processing liquids and gases, enhancing processing efficiency and reducing cross-contamination, thereby improving the quality and reliability of substrate processing.
Implementation Method 1
a suction port that is provided between the drain port and the first exhaust port in a height direction thereof
Data Source
AI summary
A substrate processing method includes a first processing step that executes a first process with a first processing liquid for a substrate that is held horizontally by a substrate holding unit and a second processing step that executes a second process with a second processing liquid for the substrate that is held horizontally by the substrate holding unit, and at the second processing step, the second processing liquid that is used for the second process flows between a first processing cup that is provided annularly around the substrate holding unit and a second processing cup that is provided annularly around the substrate holding unit and is provided on an inner side of the first processing cup, and a gas between the first processing cup and the second processing cup is exhausted from a first exhaust port.