Sealing Part With Nested Fluororesin And Elastomer For Plasma Chambers
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Solution Overview
Problem
Conventional plasma processing apparatuses lack the structural design to accommodate a double sealing structure, which is necessary for effective sealing against reactive active gases, leading to reduced durability and increased costs due to the use of expensive radical-resistant materials.
Innovation Solution
A sealing part comprising a first member resistant to eroding substances, made of fluororesin, and a second member made of high-elasticity polymeric material, with a U-shaped cross section and predetermined spaces for compressive deformation, eliminating the need for a double sealing structure and allowing for a single-body, compact design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a double sealing structure with RTR and fluoro-rubber O-ring is used, then radical resistance and sealing performance are improved, but device complexity and sealing space requirements increase
Solution Approach 1:
The sealing part is divided into two distinct members: a fluororesin member for radical resistance and a high-elasticity polymeric material member for sealing. This segmentation allows each member to specialize in its function while being integrated into a single sealing component that fits within conventional vacuum chamber structures.
Solution Approach 2:
The high-elasticity polymeric material member is disposed inside the fluororesin member, creating a nested configuration. The fluororesin member has a through-hole through which the high-elasticity polymeric material member passes, allowing the smaller sealing member to be housed within the larger protective member.
2Reliability
If FFKM is used as sealing material, then radical resistance is improved, but cost increases and durability is reduced
Solution Approach 1:
Radical resistance is applied locally where needed - the fluororesin member provides radical resistance only in the region exposed to plasma, while the high-elasticity polymeric material member provides sealing properties in the region requiring elasticity. This localized application of properties achieves the required performance at lower cost than using FFKM throughout.
Solution Approach 2:
The sealing part uses a composite structure combining fluororesin (for radical resistance) and high-elasticity polymeric material (for sealing). This composite approach leverages the strengths of each material - fluororesin's chemical inertness and radical resistance, and polymeric material's elasticity and vacuum sealing capability - to achieve superior performance at lower cost than FFKM.
3Reliability
If a double sealing structure is implemented, then sealing performance is improved, but the required sealing space increases
Solution Approach 1:
The high-elasticity polymeric material member is nested within the fluororesin member, allowing both sealing functions to be achieved within a compact configuration that fits within the limited space of conventional vacuum chamber flanges without requiring additional sealing space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides excellent durability and cost-effectiveness by preventing erosion of the high-elasticity polymeric material, maintaining a long-lasting vacuum seal without requiring a predetermined sealing space, and reducing compressive loads on the sealing components.
Implementation Method 1
a second member made of the high-elasticity polymeric material that is disposed on an outside side of the reduced pressure vessel
Implementation Method 2
when the second member is compressed in a vertical direction, portions protruding from the second member enter into the refuges
Data Source
AI summary
A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another. The radical sealing member and the vacuum sealing member are fitted together.