Net-Shaped Solvent Collector for Reduced-Pressure Drying
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Solution Overview
Problem
Existing reduced-pressure drying apparatuses for OLED substrates have complex configurations that complicate the efficient collection and separation of solvents, leading to prolonged drying times and non-uniform drying across the substrate.
Innovation Solution
A reduced-pressure drying apparatus with a net-shaped solvent collecting unit that is adiabatically cooled to maintain a temperature below the solvent's dew point during vaporization and then radiant heated to facilitate efficient solvent removal, featuring a high opening ratio and low thermal capacity to enhance solvent collection and separation efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a metallic collecting plate is used to collect solvent vapor, then solvent collection efficiency is improved, but the apparatus configuration becomes complicated due to the need for temperature control units
Solution Approach 1:
The net-shaped plate utilizes the existing cold atmosphere in the reduced-pressure drying chamber to passively cool itself and condense solvent vapor, eliminating the need for active cooling mechanisms. The plate serves its own cooling needs through the natural environment provided by the vacuum drying process.
Solution Approach 2:
The invention extracts the temperature control unit from the solvent collection system, separating the cooling function from the collection function. The cooling is achieved through the ambient cold atmosphere of the vacuum chamber rather than through an integrated temperature control system.
2Productivity
If a porous adsorption member is used to adsorb solvent, then solvent collection is improved, but the apparatus becomes complicated due to separate drying chambers and temperature control units
Solution Approach 1:
The invention merges the solvent collection function and the drying function into a single integrated chamber. The net-shaped plate collects solvent vapor during the vacuum drying process itself, eliminating the need for separate collection and drying chambers that would require additional temperature control mechanisms.
Solution Approach 2:
The vacuum drying chamber serves multiple functions: it provides the reduced-pressure environment for substrate drying, creates a cold atmosphere for solvent vapor condensation, and eliminates the need for separate solvent collection and temperature control systems.
3Productivity
If temperature control units are added to cool or heat the collecting plate, then solvent collection and vaporization efficiency is improved, but the apparatus configuration becomes complicated
Solution Approach 1:
The net-shaped plate utilizes the existing cold atmosphere in the reduced-pressure drying chamber to passively cool itself and condense solvent vapor, eliminating the need for active cooling mechanisms. The plate serves its own cooling needs through the natural environment provided by the vacuum drying process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for rapid and uniform drying of solvents on the substrate, reducing overall processing time and simplifying the apparatus design by eliminating the need for additional cooling or heating mechanisms.
Implementation Method 1
the temperature of the solvent collecting unit is decreased to a level lower than or equal to a dew point of the solvent at the pressure in the chamber at that time by a gas in the chamber which is adiabatically expanded by depressurization
Implementation Method 2
the temperature of the solvent collecting unit is maintained at the level lower than or equal to the dew point of the solvent at the pressure in the chamber at each timing until vaporization of the solvent of the solution on the substrate is completed
Implementation Method 3
within five minutes after completion of the vaporization of the solvent of the solution on the substrate, the temperature of the solvent collecting unit is increased to a level higher than the dew point of the solvent at the pressure in the chamber at that time by radiant heat from the chamber
Data Source
AI summary
A reduced-pressure drying apparatus, for drying solution on a substrate in a chamber in a depressurized state, includes a solvent collecting unit that is a net-shaped plate configured to temporarily collect a solvent in the solution vaporized from the substrate. The solvent collecting unit is provided to face the substrate in the chamber, and the net-shaped plate has an opening ratio of 60% to 80% and a thermal capacity of 850 J/K or less per 1 m2.