Neural Network Retraining for Sparse Microscopy Spectral Analysis

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Solution Overview

Problem

Charged particle microscopy faces challenges in accurately identifying chemical elements due to high false positives and false negatives, especially in sparse spectral data, and variations in detected spectra across different microscopes.

Innovation Solution

A trained neural network is used to analyze spectral data from charged particle microscopy, with the ability to retrain based on known elemental compositions to adapt to specific microscope conditions and distinguish interfering peaks, improving elemental identification accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a trained neural network is used to analyze spectral data, then elemental identification accuracy is improved, but the system requires retraining to adapt to different microscope conditions which increases operational complexity

Engineering Contradiction:
Improveelemental identification accuracyVSAvoidsystem operational complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system changes the parameters of the neural network by retraining it with different training data sets that correspond to specific microscope conditions, detector types, and energy ranges. This allows the model to adapt to varying operational parameters while maintaining high identification accuracy across different instrument configurations

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system incorporates feedback mechanisms where the neural network's identification results are evaluated against known reference data, and the model is retrained iteratively to improve performance. This feedback loop enables continuous optimization of the model for specific microscope conditions without requiring complete system redesign

Inventive Principle:
Principle #23Feedback

2Ease of operation

If traditional spectral comparison methods are used, then the system is simpler to operate, but false positives and false negatives increase especially in sparse spectral data

Engineering Contradiction:
Improvesystem simplicityVSAvoidelemental identification reliability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent replaces traditional mechanical spectral comparison methods with a neural network-based intelligent system. The neural network automatically processes spectral data, identifies patterns, and makes elemental identification decisions, substituting manual or algorithmic comparison processes with a learned model that handles complexity internally while presenting a simple interface to users

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system combines multiple data sources including spectral data, peak location information, and training data from known references into a composite analysis framework. The neural network integrates these diverse information types to produce more reliable identification results than any single method alone, particularly improving performance with sparse spectral data

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If spectral data is collected with higher quality to improve identification accuracy, then measurement time increases, but quick identification is needed for efficient analysis

Engineering Contradiction:
Improvespectral data qualityVSAvoiddata acquisition time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system performs preliminary actions by pre-training the neural network with extensive training data that covers various spectral conditions and quality levels. This pre-prepared knowledge allows the model to quickly process lower-quality or sparse spectral data without requiring extended acquisition times, as the heavy computational work was done in advance during the training phase

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The neural network is designed to extract sufficient information from partial spectral data without requiring complete high-quality spectra. The model can perform adequate elemental identification with limited or lower-quality spectral input, avoiding the need to collect excessive data that would increase measurement time

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables quick and accurate identification of chemical elements by adapting the neural network to microscope-specific parameters and operating conditions, enhancing the accuracy of elemental analysis in charged particle microscopy.

Implementation Method 1

Multiple types of emissions from a sample responsive to charged particle irradiation may provide structural and compositional information of the sample. For example, based on energy spectrum of an X-ray emission responsive to electron beam irradiation

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentEP4113109B1Method and system for determining sample composition from spectral data by retraining a neural network
Publication Date: 2024.05.01 FEI CO
  • EP4113109B1 patent drawingFigure 1
  • EP4113109B1 patent drawingFigure 2
  • EP4113109B1 patent drawingFigure 3

AI summary

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.