Neutral Layer Additive Copolymer for Sub-20nm Block Copolymer Orientation

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Solution Overview

Problem

Existing block copolymer technologies face challenges in producing nanostructures with periodicity and microdomain sizes less than 20 nanometers, often resulting in randomly oriented nanostructures that are not suitable for nano-patterning due to the lack of control over self-assembly orientation.

Innovation Solution

A composition comprising a block copolymer with a covalently bonded first and second segment, along with an additive copolymer that forms a neutral layer on the surface, facilitating the formation of domains perpendicular to the substrate by using a polymeric surface free energy reducing moiety that is not covalently bonded to the block copolymer, allowing for controlled microdomain orientation and nanostructure formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If block copolymers are used to form self-assembled nanostructures, then periodic structures with nanometer-scale contrast are produced, but it is very difficult to produce copolymer films with periodicity and microdomain sizes of less than 20 nanometers

Engineering Contradiction:

Improveperiodicity and microdomain sizeVSAvoiddifficulty to produce films with periodicity < 20 nm

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

A neutral layer is introduced as an intermediary between the substrate and the block copolymer film. This neutral layer has surface energy characteristics that are intermediate between the substrate and the copolymer blocks, enabling perpendicular orientation of microdomains with periodicity less than 20 nanometers. The neutral layer mediates the interaction between substrate and copolymer, resolving the difficulty of producing sub-20nm periodic structures.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If block copolymers self-assemble to reduce free energy, then periodic microdomain structures are formed, but the orientation of microdomains is random and not suitable for nano-patterning

Engineering Contradiction:

Improvecontrolled orientation of microdomainsVSAvoidrandom orientation of nanostructures

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The neutral layer provides locally optimized surface energy characteristics at the substrate-copolymer interface. By having intermediate surface energy properties specifically at this interface, the system promotes perpendicular orientation of microdomains in the region of interest, while maintaining the self-assembled periodic structure throughout the film. This local modification of surface properties enables controlled orientation without disrupting the overall self-assembly process.

Inventive Principle:

Principle #3Local quality

3Ease of operation

If lamellae align parallel to substrate surface, then layers form at the surface, but no lateral patterns or nanoscale surface patterns are created

Engineering Contradiction:

Improveformation of nanoscale line patternsVSAvoidorientation of lamellae

Core Design Contradiction:

Ease of operationVSShape

Solution Approach 1:

Instead of allowing lamellae to align parallel to the substrate surface (which produces no lateral patterns), the neutral layer induces the opposite orientation - perpendicular alignment of lamellae relative to the substrate. This inversion of the typical parallel orientation enables the formation of nanoscale line patterns and lateral chemical contrast at the surface, making the system suitable for nano-patterning applications.

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the creation of nanostructures with microdomains and periodicity less than 20 nanometers, providing controlled orientation and facilitating the use of block copolymers in nano-patterning applications such as semiconductor manufacturing.

Implementation Method 1

an additive copolymer that forms a neutral layer on the surface, facilitating the formation of domains perpendicular to the substrate by using a polymeric surface free energy reducing moiety

Methodology Applied

Scientific EffectSurface free energy reduction: Surface Tension

Implementation Method 2

Block copolymers form self-assembled nanostructures in order to reduce the free energy of the system

Methodology Applied

Scientific EffectSelf-assembly: Self-Assembly

Data Source

PatentUS10167411B2Neutral layer polymers, methods of manufacture thereof and articles comprising the same

Publication Date: 2019.01.01 DDP SPECIALTY ELECTRONICS MATERIALS US LLC

AI summary

Disclosed herein is a block copolymer comprising a first segment and a second segment that are covalently bonded to each other and that are chemically different from each other; where the first segment has a first surface free energy and where the second segment has a second surface free energy; and an additive copolymer; where the additive copolymer comprises a surface free energy reducing moiety where the surface free energy reducing moiety has a lower surface free energy than that of the first segment and the second segment; the additive copolymer further comprising one or more moieties having an affinity to the block copolymer; where the surface free energy reducing moiety is chemically different from the first segment and from the second segment; where the additive copolymer is not water miscible; and where the additive copolymer is not covalently bonded with the block copolymer.