NFAL Microvalve Assembly for Low-Power Precision Fluid Control
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Solution Overview
Problem
Existing pneumatic valve technologies are near the limits of miniaturization and consume high power, making them inefficient for compact configurations with high precision fluid control in industries like motion control, robotics, and haptics.
Innovation Solution
The use of near-field-acoustic-levitation (NFAL) actuated by piezoelectric motion in microvalve assemblies to open and close valves, allowing for precise control of fluid flow by generating a gap between actuator plates via alternating voltage, overcoming size and power limitations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If existing valve technologies (solenoids, motors, piezoelectric actuators) are used for fluid control, then reliable fluid control is achieved, but miniaturization is limited and power consumption is high
Solution Approach 1:
The patent replaces traditional mechanical actuation systems (solenoids, motors, piezoelectric actuators) with an acoustic field-based actuation mechanism. A piezoelectric element generates ultrasonic vibrations that create acoustic radiation pressure to levitate and position the valve plate, eliminating the need for direct mechanical contact and reducing power consumption while enabling miniaturization
Solution Approach 2:
The patent utilizes ultrasonic mechanical vibrations generated by a piezoelectric element to create acoustic radiation pressure. The valve plate is vibrated at ultrasonic frequencies, creating standing waves that generate acoustic levitation forces to open and close the valve, enabling precise control with minimal power consumption and reduced size
2Productivity
If more pneumatic channels are controlled in less space, then compact configuration is achieved, but existing valve technologies are near miniaturization limits
Solution Approach 1:
The patent divides the valve system into modular components: a piezoelectric element for actuation, a valve plate for flow control, and integrated ports. This segmentation allows multiple valve channels to be stacked or arranged in compact configurations, enabling high-density fluid control networks in limited space while maintaining precise control through independent actuation of each module
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables miniaturized valves that are power-efficient and capable of precise fluid control, overcoming the limitations of existing technologies by modulating fluid flow through controlled gap creation using NFAL, achieving high precision and low power consumption.
Implementation Method 1
near-field-acoustic-levitation (NFAL), actuated by piezoelectric motion
Implementation Method 2
periodically generate a gap between the one of the one or more exterior plates and the body plate via near-field-acoustic-levitation (NFAL)
Data Source
AI summary
Microvalve assemblies are disclosed that in some examples include a body including first and second ports and a body plate. The microvalve assemblies further include an actuator assembly including one or more exterior plates coupled to a stack. One of the one or more exterior plates contacts the body plate to form a seat and thereby restrict fluid flow from the first port to the second port, when the stack is not energized. Additionally, the actuator assembly is configured to, when the stack is energized, periodically generate a gap between the one of the one or more exterior plates and the body plate via near-field-acoustic-levitation (NFAL) to allow fluid flow through the first and second ports. Advantageously, the microvalves of this technology are relatively small and consume minimal power, thereby overcoming size and power limitations of existing valves, including pneumatic valve technologies.


