Ni-based alloy powder for semiconductor device additive manufacturing
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Solution Overview
Problem
Semiconductor production devices require Ni-based corrosion-resistant alloys with excellent corrosion resistance and complex shaping capabilities, especially for both outer and inner surfaces contacting halogen-based gases, which existing techniques struggle to achieve through conventional machining and die forging.
Innovation Solution
A Ni-based corrosion-resistant alloy powder with specific composition (14.5-24.0% Cr, 12.0-23.0% Mo, and other elements) is developed for additive manufacturing, allowing for complex shaping and high corrosion resistance in wet environments and semiconductor processing gas environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If conventional machining and die forging are used to manufacture members for semiconductor production devices, then manufacturing precision and surface quality can be achieved, but complex shaping capabilities and design freedom are limited
Solution Approach 1:
The patent replaces conventional mechanical manufacturing methods (machining and die forging) with additive manufacturing technology. This substitution enables complex three-dimensional shaping capabilities that were previously unattainable through traditional mechanical processes, while maintaining manufacturing feasibility through digital modeling and layer-by-layer construction.
2Reliability
If material is upgraded from SUS316L to Ni-based corrosion-resistant alloy, then corrosion resistance against halogen-based gases is improved, but manufacturing complexity and process difficulty increase
Solution Approach 1:
The patent changes the material parameter from SUS316L stainless steel to Ni-based corrosion-resistant alloy (containing 14.5-24.0% Cr, 12.0-23.0% Mo, and other elements). This material parameter change significantly improves corrosion resistance against halogen-based gases while the additive manufacturing process mitigates the increased manufacturing difficulty through digital precision and automated construction.
3Adaptability or versatility
If additive manufacturing is adopted to achieve complex shaping, then design freedom and shaping capability are improved, but manufacturing precision and defect control become challenging
Solution Approach 1:
The patent applies local quality control by optimizing the alloy composition with specific ranges of Cr (14.5-24.0%), Mo (12.0-23.0%), and other elements to address localized defects in additive manufacturing. The composition design targets specific regions and aspects of the manufactured parts, such as grain boundary strengthening and pore formation control, to ensure high precision and minimal defects in critical areas.
Data Source
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AI summary
Provided is a Ni-based corrosion-resistant alloy powder preferable for additive manufacturing, and provided are an additive manufacturing product and a member for semiconductor production devices having excellent corrosion resistance with few defects by using this powder. A Ni-based corrosion-resistant alloy powder for additive manufacturing comprises in mass%: 14.5 to 24.0% of Cr; 12.0 to 23.0% of Mo; 0.01 to 7.00% of Fe; 0.001 to 2.500% of Co; 0.0001 to 0.0050% of Mg; 0.001 to 0.040% of N; 0.005 to 0.50% of Mn; 0.001 to 0.200% of Si; 0.01 to 0.50% of Al; 0.001 to 0.500% of Ti; 0.001 to 0.250% of Cu; 0.001 to 0.300% of V; 0.0001 to 0.0050% of B; 0.0001 to 0.0100% of Zr; and 0.0010 to 0.0300% of O, and the balance of Ni with inevitable impurities. The inevitable impurities comprise less than 0.05% of C; less than 0.01% of S; and less than 0.01% of P. A method for producing an additive manufacturing product or a member for semiconductor production devices comprises performing additive manufacturing by using the Ni-based corrosion-resistant alloy powder.