NiAlX Alloy Buffer Layer for Magnetoresistive Stacked Structures

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Solution Overview

Problem

Current magnetoresistive effect elements face limitations in spin injection efficiency due to direct stacking of nonmagnetic and ferromagnetic layers, leading to increased dead layers and reduced crystallinity, which affects their performance in devices such as magnetic heads, sensors, and high-frequency filters.

Innovation Solution

Incorporating a NiAlX alloy layer with specific elemental compositions and thicknesses between nonmagnetic and ferromagnetic layers to alleviate lattice mismatch and improve crystallinity, thereby reducing dead layers and enhancing spin injection efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a nonmagnetic metal layer and a ferromagnetic layer are directly stacked to each other, then the structure is simple, but the dead layer expands and spin injection efficiency is not improved

Engineering Contradiction:
Improvestructure simplicityVSAvoidspin injection efficiency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

An intermediate layer comprising a NiAlX alloy layer is inserted between the nonmagnetic metal layer and the ferromagnetic layer. This intermediate layer acts as a mediator that alleviates lattice mismatch, improves crystal quality, and reduces the dead layer region, thereby enhancing spin injection efficiency without significantly complicating the overall structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The intermediate layer uses a NiAlX alloy composite material where X represents specific elements (such as Ti, V, Cr, Mn, Fe, Co, Cu, Zr, Nb, or Ta) with controlled concentration ratios. This composite material approach allows optimization of lattice matching properties while maintaining structural integrity and magnetic functionality.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If a nonmagnetic metal layer and a ferromagnetic layer are directly stacked to each other, then manufacturing is easier, but crystal quality deteriorates

Engineering Contradiction:
Improvemanufacturing easeVSAvoidcrystal quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The NiAlX alloy intermediate layer serves as a buffer that improves crystal quality by reducing lattice mismatch between the nonmagnetic metal layer and ferromagnetic layer. This intermediary structure enables better epitaxial growth and reduces dislocation density, thereby enhancing overall crystal quality while remaining compatible with standard manufacturing processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the NiAlX alloy layer is used between nonmagnetic metal layer and ferromagnetic layer, then spin injection efficiency is improved, but device complexity increases

Engineering Contradiction:
Improvespin injection efficiencyVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The improvement in spin injection efficiency is achieved locally at the interface region where the NiAlX alloy intermediate layer is positioned. This localized quality enhancement focuses the functional benefit precisely where it is needed (at the interface between nonmagnetic metal and ferromagnetic layers) without requiring complex modifications throughout the entire device structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The NiAlX alloy intermediate layer acts as a functional mediator that provides the necessary lattice matching and spin transport properties. By concentrating the complexity only in this thin intermediate layer rather than throughout the entire structure, the overall device complexity remains relatively low while achieving the desired performance improvement.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Reliability

If the NiAlX alloy layer is used between nonmagnetic metal layer and ferromagnetic layer, then dead layer is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedead layer reductionVSAvoidlattice mismatch control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The concentration ratio of element X in the NiAlX alloy is carefully controlled within specific ranges (0 < γ3/(γ1+γ2+γ3) < 0.5, with preferred ranges of 0.1 to 0.4) to optimize lattice matching. By adjusting this compositional parameter, the dead layer is reduced while maintaining manufacturability through standard thin-film deposition techniques.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The NiAlX alloy provides a composite material solution that combines Ni, Al, and X elements in specific proportions to achieve optimal lattice matching. This composite approach allows fine-tuning of the material properties to reduce dead layer formation while remaining compatible with existing manufacturing capabilities.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of NiAlX alloy layers significantly reduces dead layers and improves spin injection efficiency, leading to increased magnetoresistive effects and enhanced performance in magnetoresistive effect elements, magnetic heads, sensors, and high-frequency filters.

Implementation Method 1

lattice mismatch between the ferromagnetic layer and the nonmagnetic metal layer occurs smaller than that in a case where the nonmagnetic metal layer is stacked with only the ferromagnetic layer

Methodology Applied
Scientific EffectLattice mismatch:

Implementation Method 2

a giant magnetoresistive effect element (GMR element) configured with a multilayer film of a ferromagnetic layer and a nonmagnetic metal layer and a tunnel magnetoresistive effect element (TMR element)

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Data Source

PatentUS11422211B2Stacked structure, magnetoresistive effect element, magnetic head, sensor, high frequency filter, and oscillator
Publication Date: 2022.08.23 TDK CORP
  • US11422211B2 patent drawing
  • US11422211B2 patent drawing
  • US11422211B2 patent drawing

AI summary

A stacked structure is positioned on a nonmagnetic metal layer. The stacked structure includes a ferromagnetic layer and an intermediate layer interposed between the nonmagnetic metal layer and the ferromagnetic layer. The intermediate layer includes a NiAlX alloy layer represented by Formula (1): Niγ1Alγ2Xγ3 . . . (1), [X indicates one or more elements selected from the group consisting of Si, Sc, Ti, Cr, Mn, Fe, Co, Cu, Zr, Nb, and Ta, and satisfies an expression of 0&lt;γ&lt;0.5 in a case of γ=γ3/(γ1+γ2+γ3)].