Variable-Composition Nickel Alloy Barrier Layer

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Solution Overview

Problem

Existing barrier layers in electrical connections are thick and costly, limiting their use in miniaturized electronic structures while failing to adequately prevent diffusion and ensure adhesion between materials.

Innovation Solution

A conductive pad structure incorporating a variable-composition nickel alloy layer with varying nickel, boron, and carbon concentrations, along with a nickel layer and a conductive layer, is used to create a thinner barrier that prevents diffusion and promotes adhesion, achieved through plating techniques and controlled exposure to gases like oxygen and nitrogen.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional thick barrier layers are used, then diffusion prevention and adhesion are ensured, but the overall size of the electronic structure increases and manufacturing costs increase

Engineering Contradiction:
Improvediffusion prevention and adhesionVSAvoidbarrier layer thickness
Core Design Contradiction:
ReliabilityVSLength of stationary object

Solution Approach 1:

The barrier layer employs a graded composition where the concentration of nickel and alloying elements (such as boron and carbon) varies continuously through the thickness of the layer. The region adjacent to the substrate has higher nickel concentration for strong adhesion, while the region adjacent to the conductive layer has higher alloying element concentration for enhanced diffusion barrier properties. This local variation in composition allows each region to optimize its function, achieving both adhesion and diffusion prevention in a thinner overall structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention changes the compositional parameters of the barrier layer by introducing a continuous gradient in nickel and alloying element concentrations. This parameter change transforms the uniform composition of traditional barrier layers into a spatially varying composition, enabling the layer to simultaneously provide adhesion at one interface and diffusion barrier functionality at the other interface, thereby reducing the required thickness while maintaining reliability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If traditional thick barrier layers are used, then diffusion prevention and adhesion are ensured, but manufacturing costs increase

Engineering Contradiction:
Improvediffusion prevention and adhesionVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The graded composition structure allows the barrier layer to achieve superior performance with reduced material usage. By concentrating alloying elements only where they are most needed (at the conductive layer interface for diffusion prevention) and using higher nickel content where adhesion is critical, the design eliminates unnecessary material throughout the entire layer, reducing material costs while maintaining or improving manufacturing efficiency.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The barrier layer functions as a composite material with continuously varying composition, combining nickel with controlled gradients of alloying elements such as boron and carbon. This composite approach allows optimization of both adhesion and diffusion barrier properties simultaneously, achieving high reliability with a thinner, more cost-effective structure compared to traditional uniform barrier layers requiring greater thickness.

Inventive Principle:
Principle #40Composite materials

3Length of stationary object

If thinner barrier layers are used, then overall size is reduced, but diffusion prevention and adhesion functionality may be compromised

Engineering Contradiction:
Improvebarrier layer thicknessVSAvoiddiffusion prevention and adhesion
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

The graded composition ensures that each region of the thin barrier layer performs its specific function optimally. The substrate-adjacent region with higher nickel content provides strong adhesion, while the conductive layer-adjacent region with higher alloying element concentration provides effective diffusion prevention. This local optimization allows the overall layer to be thinner than traditional uniform barrier layers while maintaining or improving both adhesion and diffusion barrier functionality.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

By implementing a continuous gradient in compositional parameters through the layer thickness, the invention enables a thinner overall structure to achieve the same or better performance than thicker uniform layers. The parameter variation allows the layer to maximize its functional efficiency per unit thickness, achieving both adhesion and diffusion prevention in a reduced thickness while avoiding the need for excessive material.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution results in a thinner, cost-effective barrier layer that maintains functionality, reducing brittleness and cracking risks while ensuring effective material adhesion and diffusion prevention in electronic connections.

Implementation Method 1

a barrier layer can be used in semiconductor applications to prevent diffusion of the materials adjacent the barrier layer

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

Barrier layers can also be used to promote the adhesion (i.e., the wetting characteristic) between two or more materials

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS9560773B2Electrical barrier layers
Publication Date: 2017.01.31 ADEIA SEMICONDUCTOR SOLUTIONS LLC
  • US9560773B2 patent drawing
  • US9560773B2 patent drawing
  • US9560773B2 patent drawing

AI summary

An electrical connection structure includes a variable-composition nickel alloy layer with a minor constituent selected from a group consisting of boron, carbon, phosphorus, and tungsten, wherein at least over a portion of a conductive substrate, the concentration of the minor constituent decreases throughout the variable-composition nickel alloy layer in a direction from the bottom surface of the variable-composition nickel alloy layer to the top surface of the variable-composition nickel alloy layer.