Polymerization Inhibiting Compound Layer for NIL Demolding
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Solution Overview
Problem
Adhesive failure during demolding in nanoimprint lithography (NIL) can destroy the nano-sized structure formed in the molded resin element, as the template and resin element exhibit strong adhesion due to polymerization at their interface.
Innovation Solution
A layer of polymerization inhibiting compound, including functional groups such as amine, phenol, quinone, nitroso, and persistent free radicals, is deposited onto the template surface, which chemically bonds with the template and acts as a lubrication layer at the interface with the resin element, preventing polymerization and adhesive failure during demolding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the template and resin element are pressed together to form nano-sized structure, then the nano-sized structure is formed with high precision, but strong adhesion occurs at the interface causing adhesive failure during demolding
Solution Approach 1:
A polymerization inhibiting compound layer is deposited on the template surface to act as an intermediary between the template and resin element. This intermediate layer prevents polymerization at the interface while allowing nano-impression, and subsequently serves as a lubrication layer that reduces adhesion strength during demolding, enabling template removal without adhesive failure.
2Reliability
If a polymerization inhibiting compound layer is deposited on the template surface, then adhesive failure during demolding is reduced, but the device complexity increases due to additional deposition steps
Solution Approach 1:
The surface properties of the template are modified by changing the chemical composition through deposition of polymerization inhibiting compounds. This parameter change (adding functional groups that inhibit polymerization) enables the template to prevent adhesive failure during demolding while maintaining the nano-impression capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polymerization inhibiting compound effectively reduces adhesive failure during demolding, allowing for the precise removal of the template without damaging the nano-sized structure, ensuring the integrity of the fabricated nano-sized structure in the resin element.
Implementation Method 1
The deposition is performed by initiated chemical vapor deposition, atomic layer deposition, vapor deposition, or any combination thereof
Implementation Method 2
Before the deposition, the template has been exposed to oxygen plasma to increase the concentration of hydroxyl groups at the surface
Data Source
AI summary
Embodiments relate to a method of fabricating a nano-sized structure in a resin element by nanoimprint lithography (NIL). The method reduces adhesive failure during NIL demolding by inhibiting polymerization at the interface between the resin element and the template. The method includes depositing a layer of polymerization inhibiting compound onto a surface of the template. The layer of polymerization inhibiting compound has a thickness no more than 10 nanometers. A surface of the template has a nano-sized pattern that mirrors that nano-sized structure. The method further includes pressing the template onto the resin element (or the resin element onto the template) to form the nano-sized structure in the resin element. The process also includes curing the resin element after forming the nano-sized structure and removing the template from the resin element after curing the resin element. The polymerization inhibiting compound prevents adhesive failure during the removing.