Near-Infrared Quantum Cascade Laser with AlGaN Superlattice

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Solution Overview

Problem

Lasing operation in the near-infrared wavelength range has not been achieved with quantum cascade lasers due to the large photon energy requiring significant conduction band offsets, which is technically challenging with existing GaN/AlGaN-based materials.

Innovation Solution

A quantum cascade laser element with a semiconductor superlattice structure comprising four well layers of AlxGa1-xN separated by barrier layers of AlyGa1-yN, where the maximum thickness well layer accommodates only two confinement levels, allowing for near-infrared emission under an external voltage, and an index guide structure is used to enhance electron injection and optical gain.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If GaN/AlGaN-based materials are used to achieve large conduction band offset for near-infrared emission, then the photon energy requirement is met, but the manufacturing complexity and difficulty increase

Engineering Contradiction:
Improvephoton energyVSAvoidmanufacturing difficulty
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The patent applies parameter changes by systematically varying the aluminum composition ratios (x and y) in AlxGa1-xN well layers and AlyGa1-yN barrier layers to optimize the conduction band offset. By changing these compositional parameters, the patent achieves the required large offset for near-infrared emission while maintaining manufacturability through controlled material synthesis

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite materials by creating a superlattice structure composed of alternating AlxGa1-xN well layers and AlyGa1-yN barrier layers. This composite structure combines materials with different band offsets to achieve the desired electronic and optical properties for near-infrared lasing while managing the manufacturing challenges through systematic material design

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If the conduction band offset is increased to enable near-infrared lasing, then the emission wavelength is achieved, but the device complexity increases

Engineering Contradiction:
Improveemission wavelength achievementVSAvoidstructure complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the active region into multiple thin quantum well layers (four GaN layers) separated by barrier layers. This segmented superlattice structure allows each layer to be optimized independently for specific functions (carrier confinement, optical transition) while collectively achieving the near-infrared emission wavelength, thereby managing device complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions to another dimension by utilizing the quantum confinement effect in the thickness direction of the superlattice structure. By controlling the thickness of well and barrier layers in the growth direction, the patent achieves precise control over energy levels and emission wavelength without increasing lateral complexity, effectively solving the wavelength achievement problem through dimensional optimization

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables practical lasing operation in the near-infrared wavelength range with high optical gain and efficient electron injection, overcoming the limitations of previous technologies by adjusting the barrier height and wavelength range using GaN/AlGaN-based materials.

Implementation Method 1

The carriers, which are electrons, transport through the sub-bands which formed in the tilted and irregular potential, and undergo repeated inter-subband transitions (ISBT). The electrons are coupled with the electromagnetic field at each transition to produce stimulated emission and induce laser oscillation (lasing).

Methodology Applied
Scientific EffectInter-subband transition:

Implementation Method 2

The electrons are coupled with the electromagnetic field at each transition to produce stimulated emission and induce laser oscillation (lasing).

Methodology Applied
Scientific EffectStimulated emission:

Implementation Method 3

The potential acting on electrons generally has multiple wells and barriers in each unit structure. The wells and barriers of the potential for electrons are determined by the material of each layer of the unit structure, creating irregularities that reflect the conduction band offset according to position in the thickness

Methodology Applied
Scientific EffectPotential well: Potential Well

Implementation Method 4

an index guide structure is used to enhance electron injection and optical gain

Methodology Applied
Scientific EffectOptical guidance: Waveguide (optics)

Data Source

PatentEP3893341B1Quantum cascade laser element
Publication Date: 2024.01.03 RIKEN CO LTD
  • EP3893341B1 patent drawingFigure 1
  • EP3893341B1 patent drawingFigure 2A~2C
  • EP3893341B1 patent drawingFigure 3

AI summary

In order to provide a QCL element operating in the near-infrared wavelength range, the present disclosure provides a quantum cascade laser element 1000 having a semiconductor superlattice structure (QCL structure 100) sandwiched between a pair of conductive sections 20 and 30. The semiconductor superlattice structure serves as an active region that emits electromagnetic waves of a certain wavelength in the near-infrared range under an external voltage applied through the pair of conductive sections for operation. The active region has a plurality of unit structures 10U that are repeatedly stacked. Each unit structure consists of four well layers 10W1-10W4 of a composition of AlxGa1-xN, separated from each other by barrier layers 10B1-10B5 of a composition of AlyGa1-yN with 0≤x<y≤1. One of these well layers is the maximum thickness well layer, thicker than the others. Both of the pairs of conductive sections have a refractive index lower than that of the active region in which doped TCO inserted as a key role.