Nitride Crystal Substrate Growth via Non-Adhesive Positioning
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Solution Overview
Problem
Existing methods for growing nitride crystal substrates with large diameters and areas face challenges in maintaining crystal quality due to defects at the contact points of adjacent seed crystal substrates, making it difficult to achieve a continuous and high-quality crystal film.
Innovation Solution
A method involving the arrangement of nitride crystal seed substrates on a base plate with their c-planes in contact, where at least one substrate is placed non-adhesively and positioned using a regulating unit to ensure accurate alignment, allowing for the growth of a continuous c-plane crystal film across the contact points.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple seed crystal substrates are arranged and placed on a base plate with their side surfaces in contact to form a large-area substrate, then the area of the nitride crystal substrate is increased, but defects are generated in the crystal film at the contact portions of adjacent seed crystal substrates
Solution Approach 1:
A recess portion is formed in the base plate at each contact portion of adjacent seed crystal substrates. This recess acts as an intermediary structure that receives and accommodates the contact portions of the seed crystal substrates, preventing direct surface-to-surface contact that causes defects. The recess portion with smaller area than the contact portions creates a controlled interface that eliminates harmful interactions between adjacent substrates while maintaining the large-area configuration.
2Manufacturing precision
If seed crystal substrates are adhered to the base plate, then the position of seed crystal substrates is fixed, but the quality of crystal at contact portions deteriorates due to defects
Solution Approach 1:
The recess portion in the base plate serves as a mediator between the seed crystal substrates and the base plate surface. By placing the contact portions of the seed crystal substrates into these recesses, the structure provides both position regulation (fixing the substrates in place) and defect prevention (by creating a controlled interface that eliminates harmful direct contact effects).
Solution Approach 2:
The base plate is designed with different local structures: recess portions at the contact portions of adjacent seed crystal substrates to prevent defects, and protruding portions at other areas to provide support. This local differentiation allows the base plate to simultaneously achieve position fixation and crystal quality improvement by applying different structural characteristics to different locations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the quality of the crystal film by minimizing defects and irregularities, resulting in a high-quality, continuous c-plane over the entire surface of the nitride crystal substrate.
Implementation Method 1
growing a crystal film on the seed crystal substrate assembly
Data Source
AI summary
There is provided a method for manufacturing a nitride crystal substrate including: a first step of constituting a seed crystal substrate assembly by arranging and placing a plurality of seed crystal substrates which are made of nitride crystal and whose principal surfaces are c-planes, on a base plate so that side surfaces of the adjacent seed crystal substrates are in contact with each other; and a second step of growing a crystal film on the seed crystal substrate assembly, wherein in the first step, the seed crystal substrates are placed on the base plate in a state of regulating a position of the seed crystal substrates in an in-plane direction by a position regulating unit to regulate the position of the seed crystal substrates in the in-plane direction, and at least one of the seed crystal substrates is placed non-adhesively to the base plate.