Group III Nitride Light-Emitting Device With Compositionally Graded Interface

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Solution Overview

Problem

Group III nitride-based compound semiconductor light-emitting devices face issues with misfit dislocations and compositional instability at interfaces, leading to reduced emission intensity and shortened service life, particularly in near-UV and blue-purple light-emitting LEDs and laser diodes.

Innovation Solution

The introduction of compositionally varying regions at the interfaces between the well layer and adjacent layers, where the lattice constants approach that of the well layer, suppresses misfit dislocations and multiple energy levels, enhancing crystallinity and device characteristics. This is achieved through controlled feeding of indium and gallium sources during vapor growth, ensuring a stable In composition at the mid-portion of the well layer and minimizing compositional instability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a heterojunction structure with different bandgap energies is employed to achieve light emission, then light-emitting device functionality is enabled, but misfit dislocations occur at heterojunction interfaces due to lattice mismatch

Engineering Contradiction:
Improvelight-emitting device functionalityVSAvoidservice life
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

An AlInGaN intermediate layer is introduced between the InGaN well layer and AlGaN barrier layers. This intermediate layer acts as a mediator with graded composition (Al content varying from 0 to 0.2) that bridges the lattice mismatch between the well layer and barrier layers, preventing misfit dislocations while maintaining the heterojunction light-emitting functionality

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The Al content in the intermediate layer is locally varied through composition grading. The Al content increases from 0 at the well layer interface to 0.2 at the barrier layer interface, creating a gradual lattice constant transition zone that eliminates abrupt interface discontinuities and prevents dislocation formation

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If indium-containing Group III nitride-based compound semiconductor layers are used to achieve narrow bandgap for light emission, then light-emitting layer functionality is improved, but mutual diffusion of indium and aluminum occurs at interfaces

Engineering Contradiction:
Improvelight-emitting layer functionalityVSAvoidcompositional stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The AlInGaN intermediate layer serves as a diffusion barrier between the InGaN well layer and AlGaN barrier layers. By providing a compositional gradient zone, it prevents direct contact between In-containing and Al-containing layers, thereby suppressing mutual diffusion of indium and aluminum atoms during device operation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The composition parameters (Al content) are continuously changed through the intermediate layer thickness direction, creating a smooth transition from In-rich to Al-rich composition. This parameter grading prevents abrupt compositional changes that would drive diffusion processes

Inventive Principle:
Principle #35Parameter changes

3Reliability

If compositionally varying regions are introduced to suppress misfit dislocations, then crystallinity is enhanced, but device structure complexity increases

Engineering Contradiction:
ImprovecrystallinityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The intermediate layer combines multiple functions: it provides lattice matching through composition grading, prevents misfit dislocations, and acts as a diffusion barrier. By merging these functions into a single layer with graded composition rather than multiple discrete layers, the structure complexity is minimized while achieving high crystallinity

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach significantly enhances emission intensity, output, and service life of the semiconductor devices by promoting electron-hole recombination efficiency and maintaining a stable band structure, particularly evident in three- or two-component semiconductors of high crystallinity.

Implementation Method 1

introduction of compositionally varying regions at the interfaces between the well layer and adjacent layers, where the lattice constants approach that of the well layer

Methodology Applied
Scientific EffectLattice constant transition:

Implementation Method 2

achieved through controlled feeding of indium and gallium sources during vapor growth

Methodology Applied
Scientific EffectVapor growth: Chemical Vapour Deposition

Data Source

PatentUS7629619B2Group III nitride-based compound semiconductor light-emitting device and method for producing the same
Publication Date: 2009.12.08 TOYODA GOSEI CO LTD
  • US7629619B2 patent drawing
  • US7629619B2 patent drawing
  • US7629619B2 patent drawing

AI summary

A Group III nitride-based compound semiconductor light-emitting device having a quantum well structure, includes a well layer, a first layer formed on one surface of the well layer, a second layer formed on the other surface of the well layer, a first region provided in the vicinity of the interface between the first layer and the well layer, and a second region provided in the vicinity of the interface between the second layer and the well layer. A composition of the first and second regions gradually changes such that the lattice constants of the first and second layers approach the lattice constant of the well layer as a position approaches said well layer.