Nitride Membrane Micro Check Valve for High-Temperature Sealing
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Solution Overview
Problem
Existing microcheck valves are not suitable for high-temperature applications and have inadequate closing effects, making them unsuitable for safety-relevant applications such as medical use, due to their construction methods and materials.
Innovation Solution
A micro-return valve with a substrate body featuring a membrane made of a nitride layer, deposited using processes like LPCVD or PECVD, which is partially flexible and connected to the substrate only in specific areas, allowing for reliable fluid and aerosol control through a sealing web and membrane configuration, enabling operation up to temperatures above 350°C.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If anode welding is used to attach metal foil to substrate, then the connection can be made at low cost with simple process, but the connection dissolves at temperatures above a few hundred degrees Celsius making it unsuitable for high-temperature applications
Solution Approach 1:
The patent changes the bonding temperature parameter from low-temperature anode welding to high-temperature sintering. The sintering process bonds metal particles at temperatures above 1000°C, creating a permanent connection that can withstand high-temperature applications, directly resolving the temperature resistance issue while maintaining manufacturing feasibility through a single-step process
Solution Approach 2:
The patent uses a composite structure combining a porous metal foam layer with a ceramic or metallic substrate. This composite material approach allows the metal foam to provide flexible sealing while the substrate provides structural stability and high-temperature resistance, enabling the valve to function reliably at elevated temperatures
2Ease of operation
If freely movable structures are used in check valves, then the valve can achieve simple operation and low cost, but the closing effect is inadequate making them unsuitable for safety-relevant applications
Solution Approach 1:
The patent employs a dynamically responsive membrane that automatically adjusts its position based on pressure differential. The membrane remains flexible and movable during normal operation for simple function, but under reverse pressure it deforms to completely seal the aperture, providing both ease of operation and reliable closing effect required for safety applications
Solution Approach 2:
The patent replaces rigid freely movable structures with a flexible membrane made of elastomeric or polymeric material. This thin film structure provides superior sealing contact with the aperture walls compared to rigid components, achieving complete closure while maintaining simple operation through elastic deformation driven by pressure differential
3Temperature
If a membrane is deposited on substrate using deposition processes, then the valve can withstand high temperatures above 350°C, but the manufacturing process becomes more complex
Solution Approach 1:
The patent combines multiple functions into a single integrated membrane component that simultaneously provides sealing, structural support, and high-temperature resistance. The membrane is directly deposited onto the substrate aperture region in one manufacturing step, eliminating the need for separate assembly of multiple components and reducing overall process complexity despite using advanced deposition techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The micro-return valve provides a reliable fluid and aerosol control mechanism that can withstand high temperatures, ensuring effective blocking and flow management in both open and closed states, suitable for applications in medical and other high-temperature environments.
Implementation Method 1
The membrane is preferably formed by a deposited layer, which is thus produced by a deposition process, in particular an LPCVD, PECVD, sputtering or vapor deposition process.
Implementation Method 2
The membrane is preferably formed by a deposited layer, which is thus produced by a deposition process, in particular an LPCVD, PECVD, sputtering or vapor deposition process.
Data Source
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AI summary
The invention relates to a micro check valve (10) having a substrate body (12) with a top side (16) and a bottom side (14), wherein at least the top side (16) has a seal web (34) between a first trough (30) and a second trough (32). Furthermore, the substrate body (12) has a channel (24) which leads from the bottom side (14) of the substrate body (12) to the top side (16) of the substrate body (12) and which ends on the top side (16) of the substrate body (12) in the first trough (30). Furthermore, on the top side (16) of the substrate body (12), there is arranged a membrane which is flexibly mounted at least in the region of the seal web (34) of the first and second trough (30, 32). The membrane (18) furthermore has at least one aperture (42) which is arranged above the second trough (32). The invention also relates to a system with multiple micro check valves (10) and to a method for the production thereof.