Nitride Semiconductor Light Emitting Device With Tunnel Junction

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Solution Overview

Problem

The high electrical resistance of p-type semiconductor layers in light emitting devices, particularly those using nitride semiconductors, affects the device's characteristics due to carrier scattering and Mg diffusion, leading to increased leakage currents and reduced light emission efficiency.

Innovation Solution

A light emitting device structure is implemented with a tunnel junction layer and a p-type semiconductor layer formed on a nitride semiconductor substrate, where the active layer is formed after the tunnel junction layer, reducing damage and allowing for a lower p-type semiconductor layer thickness, and using InGaN layers to suppress Mg diffusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a p-type semiconductor layer is used to form a current-confined structure, then carrier scattering is reduced and light emission efficiency is improved, but electrical resistance increases significantly

Engineering Contradiction:
Improvecurrent-confined structure formationVSAvoidelectrical resistance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

An n-type semiconductor layer is introduced as an intermediary between the substrate and the p-type semiconductor layer. This n-type layer serves as a mediator that provides a low-resistance current path while allowing the p-type layer to maintain its current-confined structure for efficient light emission. The n-type layer compensates for the high resistance of the p-type layer without disrupting the current confinement geometry.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-generated harmful factors

If the p-type semiconductor layer thickness is reduced to minimize Mg diffusion, then light emission efficiency improves, but current confinement capability deteriorates

Engineering Contradiction:
ImproveMg diffusionVSAvoidcurrent confinement
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The current confinement function is segmented between two layers: the n-type semiconductor layer provides the primary current path with thin thickness to minimize Mg diffusion, while the p-type semiconductor layer maintains the current-confined structure geometry. This segmentation allows each layer to optimize its thickness for its specific function without compromising the other.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If growth temperature is increased to improve crystal quality, then light emission efficiency improves, but Mg diffusion increases

Engineering Contradiction:
Improvecrystal qualityVSAvoidMg diffusion
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The n-type semiconductor layer acts as a thermal buffer and Mg diffusion barrier. It allows the p-type layer to be grown at higher temperatures for improved crystal quality while the n-type layer absorbs excess thermal energy and prevents Mg atoms from diffusing into critical regions, thus decoupling the temperature-dependent crystal quality from Mg diffusion.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces electrical resistance, minimizes leakage currents, and enhances light emission efficiency by controlling the growth temperatures and impurity profiles, resulting in improved device performance.

Implementation Method 1

a tunnel junction layer disposed on a part of the first n-type semiconductor layer

Methodology Applied
Scientific EffectQuantum tunneling:

Data Source

PatentUS10797470B2Light emitting device and method of manufacturing light emitting device
Publication Date: 2020.10.06 RICOH CO LTD
  • US10797470B2 patent drawing
  • US10797470B2 patent drawing
  • US10797470B2 patent drawing

AI summary

A light emitting device includes: a first n-type semiconductor layer disposed on a substrate; a tunnel junction layer disposed on a part of the first n-type semiconductor layer; a p-type semiconductor layer disposed on the first n-type semiconductor layer and covering the tunnel junction layer; an active layer disposed on the p-type semiconductor layer; and a second n-type semiconductor layer disposed on the active layer.