Nitrided Transition Metal Buffer Layer for Nanowire Epitaxy

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Solution Overview

Problem

The growth of semiconductor nanowires is hindered by incorrect crystallographic orientation of substrates and nucleation layers, which impede polarization in light-emitting nanodiodes, requiring a solution that optimizes crystallographic orientation and electrical conductivity for efficient nanowire growth.

Innovation Solution

A device comprising a substrate, semiconductor nanowires, and a buffer layer of nitrided transition metals like vanadium, chromium, or zirconium nitride, which is electrically conductive and has a stoichiometric structure favorable for epitaxy of gallium nitride, allowing for optimized crystallographic orientation and electrical contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional substrates (silicon, sapphire, silicon carbide) are used for nanowire growth, then the substrate provides mechanical support and thermal stability, but the lattice mismatch causes high density misfit dislocations and degraded nanowire material quality

Engineering Contradiction:
Improvenanowire material qualityVSAvoidlattice matching precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

A buffer layer comprising a transition metal nitride is introduced between the conventional substrate and the III-V semiconductor nanowire. This buffer layer acts as an intermediary that reduces lattice mismatch and minimizes misfit dislocations, thereby improving nanowire material quality without requiring a complete change of substrate material.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The buffer layer is formed as a composite structure involving a transition metal nitride material that combines the advantages of both the substrate and the nanowire materials. This composite approach allows for gradual lattice transition and reduced dislocation density at the interface.

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional substrates are used without buffer layer, then the device structure is simpler, but misfit dislocations propagate into the nanowire causing degraded material quality

Engineering Contradiction:
Improvenanowire material qualityVSAvoiddevice structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The buffer layer serves as a mediator that blocks the propagation of misfit dislocations from the substrate into the nanowire. By positioning this layer at the interface, it prevents defect transmission while maintaining overall device functionality with minimal additional complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If epitaxial lift-off is used to remove dislocated buffer layers, then dislocation-free nanowires can be obtained, but the manufacturing process becomes more complex and costly

Engineering Contradiction:
Improvenanowire material qualityVSAvoidmanufacturing process simplicity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The invention extracts or removes the problematic buffer layer containing misfit dislocations from the final device structure through epitaxial lift-off. This allows the nanowire to be obtained free of dislocations while the sacrificed buffer layer is discarded, achieving high material quality without requiring complex in-situ buffer layer management.

Inventive Principle:
Principle #2Taking out (Extraction)

4Productivity

If III-V semiconductor nanowires are grown on conventional substrates, then the nanowire can be formed, but misfit dislocations are generated due to lattice mismatch

Engineering Contradiction:
Improvenanowire growth efficiencyVSAvoidnanowire material quality
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The transition metal nitride buffer layer acts as an intermediary growth interface that enables efficient nanowire formation while simultaneously reducing lattice mismatch. This allows continuous production of nanowires with improved material quality without significantly impacting growth efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration promotes the growth of nanowires with favorable crystallographic orientation, enhances electrical conductivity, and enables efficient polarization for light-emitting diodes, improving the overall performance of nanowire-based devices.

Implementation Method 1

the buffer layer is formed at least in part by a layer of nitrided transition metal (9) from which the nanowire (2) extends

Methodology Applied
Scientific EffectLattice mismatch buffering:

Implementation Method 2

comprising: providing a substrate (1); providing a catalyst particle on the substrate (1); providing a source of III-V semiconductor materials; growing at least one III-V semiconductor nanowire (2) from the catalyst particle

Methodology Applied
Scientific EffectVapor-liquid-solid growth:

Data Source

PatentEP4120358A2Electronic device with nanowire(s) provided with a buffer layer in a transition metal, method for growth of at least one nanowire, and method for manufacturing a device
Publication Date: 2023.01.18 ALEDIA INC
  • EP4120358A2 patent drawingFigure 1~3
  • EP4120358A2 patent drawingFigure 4~5
  • EP4120358A2 patent drawingFigure 6~8

AI summary

The electronic device comprises a substrate (1), at least one semiconductor nanowire (2), and a buffer layer (3) interposed between the substrate (1) and said nanowire (2). The buffer layer (3) is formed at least in part by a layer of nitrided transition metal (9) from which the nanowire (2) extends, said nitrided transition metal being selected from: vanadium nitride, chromium nitride, zirconium nitride, niobium nitride, molybdenum nitride, hafnium nitride, or tantalum nitride.