Nitrogen Cover Module for Moisture-Safe Substrate Transfer
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Solution Overview
Problem
The challenge is to prevent substrates from coming into contact with moisture during transport between processing chambers in a substrate treatment apparatus, which can lead to CD variations and pattern damage due to humidity exposure.
Innovation Solution
A cover module is introduced that includes a base portion, a cover portion with openable and closable covers, and a gas supply unit to create a nitrogen atmosphere during transport, ensuring the substrate is shielded from external moisture and gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is transported in an externally exposed state, then the transport process is simple and fast, but the substrate comes into contact with moisture and external air causing CD variation and pattern damage
Solution Approach 1:
The transport unit is configured to maintain an inert atmosphere (nitrogen or dry air) within its internal space during substrate transport. Gas supply units provide continuous flow of inert gas, and the cover module seals the transport unit to prevent moisture ingress from the external environment, allowing fast transport without substrate exposure to harmful moisture
Solution Approach 2:
The transport system is divided into a sealed transport unit with internal space that can be independently controlled, separated from the external environment. The cover module with movable covers creates distinct sealed zones, allowing the substrate to be transported in isolation from ambient moisture while maintaining process efficiency
2Reliability
If the cover module is fully sealed, then the substrate is protected from moisture, but the device complexity increases due to multiple movable covers and gas supply units
Solution Approach 1:
The cover module employs movable covers that can dynamically open and close based on operational requirements. The covers are positioned to seal only when needed during substrate transport, while allowing access during loading and unloading, thus providing reliable protection without requiring a permanently complex sealed structure
Solution Approach 2:
Gas supply units act as intermediaries between the external environment and the substrate, providing a protective inert atmosphere that mediates the interaction between the substrate and external moisture. This allows the system to maintain simplicity in mechanical sealing while achieving reliable protection through atmospheric control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents substrate damage by maintaining a nitrogen atmosphere during transport, minimizing defects caused by moisture and particle contact.
Implementation Method 1
a gas supply unit including a first supply portion disposed on the upper plate and a second supply portion disposed on at least one of the first cover and the second cover
Data Source
AI summary
A cover module includes a base portion, a cover portion disposed on an upper portion of the base portion, the cover portion including an upper plate, a first cover disposed at a first end of the upper plate to be openable and closable, and a second cover disposed at a second end of the upper plate to be openable and closable, and a gas supply unit including a first supply portion disposed on the upper plate and a second supply portion disposed on at least one of the first cover and the second cover.