Nitrogen-Free Ozone Unit for Semiconductor Purity
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Solution Overview
Problem
Conventional ozone gas supply systems for semiconductor fabrication face issues with high nitrogen content in raw material gases leading to metal contamination, corrosion, and low reliability due to by-product gases like NOX and nitric acid, requiring large space and high maintenance costs.
Innovation Solution
A nitrogen-free ozone generation unit that uses high purity oxygen without added nitrogen, incorporating a photocatalytic material for ozone generation, a compact integrated structure with a controller, and a gas filter to remove impurities and moisture, ensuring high-purity and high-concentration ozone gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If nitrogen gas is added to oxygen gas to enhance ozone generation efficiency through catalytic reaction, then ozone concentration increases, but metal contamination and corrosion occur due to NOX by-products
Solution Approach 1:
The invention extracts and removes the harmful nitrogen component from the raw material gas, using only high-purity oxygen (99.99% or higher) without adding nitrogen. This eliminates the source of NOX by-products that cause metal contamination and corrosion, while still achieving high ozone generation efficiency through optimized discharge conditions and catalysts.
Solution Approach 2:
The invention changes the compositional parameters of the raw material gas from oxygen-nitrogen mixture to high-purity oxygen only, and adjusts discharge parameters (power, frequency, pressure) to optimize ozone generation efficiency without nitrogen, thereby eliminating harmful by-products while maintaining productivity.
2Quantity of substance
If conventional ozone generation methods using nitrogen-added oxygen are employed, then high concentration ozone is generated, but system reliability decreases due to nitric acid generation and corrosion
Solution Approach 1:
The invention removes nitrogen from the raw material gas composition, eliminating the chemical reaction pathway that produces nitric acid and other harmful by-products. This extraction of the harmful component (nitrogen) preserves system reliability while maintaining high ozone concentration through alternative generation mechanisms using pure oxygen and optimized discharge conditions.
3Adaptability or versatility
If multiple ozone generation mechanisms are provided for multiple ozone treatment apparatuses, then independent ozone supply is achieved, but device complexity and maintenance costs increase
Solution Approach 1:
The invention creates a universal, standardized nitrogen-free ozone generation unit that can be independently deployed for each ozone treatment apparatus. Each unit is self-contained with integrated control, making them modular and interchangeable. This multi-functional design allows independent operation for each apparatus while reducing overall complexity through standardization and elimination of nitrogen-related complications.
4Manufacturing precision
If high purity oxygen without added nitrogen is used, then contamination is reduced, but ozone generation efficiency decreases
Solution Approach 1:
The invention compensates for the lack of nitrogen-catalyzed efficiency by optimizing other parameters: increasing discharge power and frequency, adjusting gas pressure, and using catalysts or activated surfaces. These parameter changes maintain high ozone generation efficiency while preserving the purity benefits of nitrogen-free raw material gas.
Solution Approach 2:
The invention replaces the chemical catalysis mechanism (nitrogen-based) with alternative mechanisms such as enhanced physical discharge, surface catalysis, or optimized electromagnetic fields. This substitution eliminates the need for nitrogen while maintaining or improving ozone generation efficiency through different physical or chemical pathways.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a downsized, reliable, and high-purity ozone gas supply system with independent control over flow rate and concentration, reducing contamination and maintenance needs, and enhancing ozone generation efficiency.
Implementation Method 1
a photocatalytic material for generating ozone is applied to a discharge surface
Implementation Method 2
a catalytic reaction of a small amount of NO2 that is generated as a result of a discharge reaction
Implementation Method 3
a gas filter to remove impurities and moisture
Data Source
AI summary
A gas pipe integrated block includes a plurality of internal pipe paths. The plurality of internal pipe paths are connected to a nitrogen-free ozone generator in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC, a gas filter, and an APC), a raw material gas supply port, and an ozone gas output port. Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.